Inventor
NOJI NOBUHARU
JP94 patents
⚠️ This page may combine multiple inventors who share the name “NOJI NOBUHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
44 patentsUS7138629B2Nov 21, 2006
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP151 citations99
US7109483B2Sep 19, 2006
Method for inspecting substrate, substrate inspecting system and electron beam apparatus
EBARA CORP159 citations99
US6855929B2Feb 15, 2005
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
EBARA CORP106 citations99
US6593152B2Jul 15, 2003
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP109 citations99
US9368314B2Jun 14, 2016
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP38 citations98
US7928382B2Apr 19, 2011
Detector and inspecting apparatus
EBARA CORP51 citations98
US7420164B2Sep 2, 2008
Objective lens, electron beam system and method of inspecting defect
EBARA CORP68 citations98
US7244932B2Jul 17, 2007
Electron beam apparatus and device fabrication method using the electron beam apparatus
EBARA CORP74 citations98
US7220604B2May 22, 2007
Method and apparatus for repairing shape, and method for manufacturing semiconductor device using those
EBARA CORP59 citations98
US5582017ADec 10, 1996
Cryopump
EBARA CORP108 citations97
US7741601B2Jun 22, 2010
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP36 citations96
US7601972B2Oct 13, 2009
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP49 citations96
US7365324B2Apr 29, 2008
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP49 citations96
US7223973B2May 29, 2007
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
EBARA CORP38 citations96
US7135676B2Nov 14, 2006
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP61 citations96
US7049585B2May 23, 2006
Sheet beam-type testing apparatus
EBARA CORP55 citations96
US5971711AOct 26, 1999
Vacuum pump control system
EBARA CORP53 citations95
US8053726B2Nov 8, 2011
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP11 citations93
US7928378B2Apr 19, 2011
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
EBARA CORP17 citations93
US7569838B2Aug 4, 2009
Electron beam inspection system and inspection method and method of manufacturing devices using the system
EBARA CORP23 citations93
US7417236B2Aug 26, 2008
Sheet beam-type testing apparatus
EBARA CORP20 citations93
US7411191B2Aug 12, 2008
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP20 citations93
US7408175B2Aug 5, 2008
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
EBARA CORP19 citations93
US7385197B2Jun 10, 2008
Electron beam apparatus and a device manufacturing method using the same apparatus
EBARA CORP30 citations93
US7351969B2Apr 1, 2008
Electron beam inspection system and inspection method and method of manufacturing devices using the system
EBARA CORP37 citations93
US7312449B2Dec 25, 2007
Electron beam system and method of manufacturing devices using the system
EBARA CORP20 citations93
US7297949B2Nov 20, 2007
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP28 citations93
US7285010B2Oct 23, 2007
TDI detecting device, a feed-through equipment and electron beam apparatus using these devices
EBARA CORP19 citations93
US7157703B2Jan 2, 2007
Electron beam system
EBARA CORP29 citations93
US7129485B2Oct 31, 2006
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP30 citations93
US7109484B2Sep 19, 2006
Sheet beam-type inspection apparatus
EBARA CORP23 citations93
US7005641B2Feb 28, 2006
Electron beam apparatus and a device manufacturing method by using said electron beam apparatus
EBARA CORP35 citations93
US6853143B2Feb 8, 2005
Electron beam system and method of manufacturing devices using the system
EBARA CORP23 citations93
US8946631B2Feb 3, 2015
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP11 citations92
US7439502B2Oct 21, 2008
Electron beam apparatus and device production method using the electron beam apparatus
EBARA CORP23 citations92
US7256405B2Aug 14, 2007
Sample repairing apparatus, a sample repairing method and a device manufacturing method using the same method
EBARA CORP21 citations92
US7247848B2Jul 24, 2007
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP28 citations92
US6700273B1Mar 2, 2004
Gas transfer machine
EBARA CORP24 citations92
US6332925B1Dec 25, 2001
Evacuation system
EBARA CORP46 citations92
US6158226ADec 12, 2000
Trapping device
EBARA CORP19 citations92
US6051053AApr 18, 2000
Trapping device and method of operation therefor
EBARA CORP20 citations92
US9406480B2Aug 2, 2016
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP3 citations84
US8803103B2Aug 12, 2014
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP6 citations84
US7888642B2Feb 15, 2011
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP9 citations84
TOSHIBA KK
3 patentsUS6992290B2Jan 31, 2006
Electron beam inspection system and inspection method and method of manufacturing devices using the system
TOSHIBA KK97 citations98
US6909092B2Jun 21, 2005
Electron beam apparatus and device manufacturing method using same
TOSHIBA KK77 citations98
US7241993B2Jul 10, 2007
Inspection system by charged particle beam and method of manufacturing devices using the system
TOSHIBA KK54 citations96
NIKON CORP
1 patentKIMBA TOSHIFUMI
1 patentTECHNOLOGY RESEARCH ASS OF SUP
1 patentShowing the top 50 of 94 patents by PatentIndex Score.