Inventor
GARCIA JAMES P
US20 patents
⚠️ This page may combine multiple inventors who share the name “GARCIA JAMES P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
19 patentsUS6988327B2Jan 24, 2006
Methods and systems for processing a substrate using a dynamic liquid meniscus
LAM RES CORP164 citations99
US7198055B2Apr 3, 2007
Meniscus, vacuum, IPA vapor, drying manifold
LAM RES CORP41 citations96
US7069937B2Jul 4, 2006
Vertical proximity processor
LAM RES CORP49 citations96
US7234477B2Jun 26, 2007
Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces
LAM RES CORP55 citations95
US7000622B2Feb 21, 2006
Methods and systems for processing a bevel edge of a substrate using a dynamic liquid meniscus
LAM RES CORP50 citations94
US7389783B2Jun 24, 2008
Proximity meniscus manifold
LAM RES CORP24 citations92
US7350316B2Apr 1, 2008
Meniscus proximity system for cleaning semiconductor substrate surfaces
LAM RES CORP11 citations92
US7143527B2Dec 5, 2006
System and method for modulating flow through multiple ports in a proximity head
LAM RES CORP19 citations92
US6910240B1Jun 28, 2005
Wafer bevel edge cleaning system and apparatus
LAM RES CORP44 citations92
US7520285B2Apr 21, 2009
Apparatus and method for processing a substrate
LAM RES CORP11 citations84
US7003899B1Feb 28, 2006
System and method for modulating flow through multiple ports in a proximity head
LAM RES CORP11 citations84
US7395611B2Jul 8, 2008
System processing a substrate using dynamic liquid meniscus
LAM RES CORP7 citations74
US7387689B2Jun 17, 2008
Methods for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces
LAM RES CORP6 citations74
US7127831B2Oct 31, 2006
Methods and systems for processing a substrate using a dynamic liquid meniscus
LAM RES CORP9 citations74
US7464719B2Dec 16, 2008
Multi-menisci processing apparatus
LAM RES CORP3 citations63
US7383844B2Jun 10, 2008
Meniscus, vacuum, IPA vapor, drying manifold
LAM RES CORP2 citations63
US7192488B2Mar 20, 2007
Methods and systems for processing a bevel edge of a substrate using a dynamic liquid meniscus
LAM RES CORP3 citations61
US6851436B1Feb 8, 2005
Substrate processing using a fluid re-circulation system in a wafer scrubbing system
LAM RES CORP5 citations61
US7862663B2Jan 4, 2011
Methods for processing a substrate with a flow controlled meniscus
LAM RES CORP0 citations52