Inventor
OSAKABE YUICHI
JP8 patents
Patents
8 patentsUS6226133B1May 1, 2001
Optical apparatus and a method of transporting the same
CANON KK25 citations90
US6532056B2Mar 11, 2003
Alignment system and projection exposure apparatus
CANON KK33 citations89
US6989885B2Jan 24, 2006
Scanning exposure apparatus and method
CANON KK7 citations72
US7218379B2May 15, 2007
Scanning exposure apparatus and method
CANON KK2 citations61
US6847432B2Jan 25, 2005
Alignment system and projection exposure apparatus
CANON KK2 citations60
US6683673B2Jan 27, 2004
Alignment system and projection exposure apparatus
CANON KK3 citations60
US7050150B2May 23, 2006
Exposure apparatus
CANON KK0 citations51
US7626680B2Dec 1, 2009
Exposure apparatus and device fabrication method using the same
CANON KK0 citations48