Inventor
OHSAKI YOSHINORI
JP27 patents
⚠️ This page may combine multiple inventors who share the name “OHSAKI YOSHINORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
24 patentsUS7221431B2May 22, 2007
Exposure apparatus
CANON KK49 citations96
US6040909AMar 21, 2000
Surface position detecting system and device manufacturing method using the same
CANON KK68 citations96
US6278514B1Aug 21, 2001
Exposure apparatus
CANON KK45 citations92
US6215549B1Apr 10, 2001
Apparatus for measuring optical characteristics
CANON KK34 citations92
US7154582B2Dec 26, 2006
Exposure apparatus and method
CANON KK12 citations84
US6833906B1Dec 21, 2004
Projection exposure apparatus, and device manufacturing method using the same
CANON KK18 citations84
US5903352AMay 11, 1999
Apparatus and method for measuring optical anisotropy
CANON KK17 citations84
US6088115AJul 11, 2000
Apparatus and method for measuring optical anisotropy
CANON KK13 citations74
US5838453ANov 17, 1998
Apparatus and method for measuring optical anisotropy
CANON KK8 citations74
US6646714B2Nov 11, 2003
Exposure apparatus, imaging performance measurement method, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method
CANON KK10 citations73
US6989885B2Jan 24, 2006
Scanning exposure apparatus and method
CANON KK7 citations72
US8013980B2Sep 6, 2011
Exposure apparatus equipped with interferometer and exposure apparatus using the same
CANON KK2 citations62
US7330237B2Feb 12, 2008
Exposure apparatus equipped with interferometer and method of using same
CANON KK4 citations62
US7046333B2May 16, 2006
Exposure method
CANON KK2 citations62
US6649484B2Nov 18, 2003
Aligning method, exposure apparatus using this aligning method, and semiconductor device manufacturing method utilizing this exposure apparatus
CANON KK5 citations62
US7218379B2May 15, 2007
Scanning exposure apparatus and method
CANON KK2 citations61
US7602504B2Oct 13, 2009
Exposure apparatus and device manufacturing method
CANON KK4 citations56
US7417712B2Aug 26, 2008
Exposure apparatus having interferometer and device manufacturing method
CANON KK6 citations54
US7403263B2Jul 22, 2008
Exposure apparatus
CANON KK0 citations52
US7148956B2Dec 12, 2006
Exposure method
CANON KK0 citations52
US7050150B2May 23, 2006
Exposure apparatus
CANON KK0 citations51
US10401744B2Sep 3, 2019
Calibration method, measurement apparatus, exposure apparatus, and method of manufacturing article
CANON KK0 citations42
US7787103B2Aug 31, 2010
Projection exposure apparatus, optical member, and device manufacturing method
CANON KK0 citations41
US9639008B2May 2, 2017
Lithography apparatus, and article manufacturing method
CANON KK0 citations37