Inventor
HERBST WALTRAUD
DE8 patents
⚠️ This page may combine multiple inventors who share the name “HERBST WALTRAUD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
7 patentsUS6893972B2May 17, 2005
Process for sidewall amplification of resist structures and for the production of structures having reduced structure size
INFINEON TECHNOLOGIES AG280 citations97
US6770423B2Aug 3, 2004
Negative resist process with simultaneous development and silylation
INFINEON TECHNOLOGIES AG7 citations72
US7052820B2May 30, 2006
Silicon-containing resist for photolithography
INFINEON TECHNOLOGIES AG3 citations61
US6759184B2Jul 6, 2004
Amplification of resist structures of fluorinated resist polymers by structural growth of the structures by targeted chemical bonding of fluorinated oligomers
INFINEON TECHNOLOGIES AG2 citations61
US7078709B2Jul 18, 2006
Apparatus and method for proof of outgassing products
INFINEON TECHNOLOGIES AG3 citations59
US7018784B2Mar 28, 2006
Process for increasing the etch resistance and for reducing the hole and trench width of a photoresist structure using solvent systems of low polarity
INFINEON TECHNOLOGIES AG0 citations40
US7033740B2Apr 25, 2006
Photoresists with reaction anchors for chemical consolidation of resist structures for exposures at 157 nm
INFINEON TECHNOLOGIES AG0 citations39