Inventor
BRAN MARIO E
US36 patents
⚠️ This page may combine multiple inventors who share the name “BRAN MARIO E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VERTEQ INC
22 patentsUS6039059AMar 21, 2000
Wafer cleaning system
VERTEQ INC133 citations99
US5286657AFeb 15, 1994
Single wafer megasonic semiconductor wafer processing system
VERTEQ INC139 citations99
US5090432AFeb 25, 1992
Single wafer megasonic semiconductor wafer processing system
VERTEQ INC169 citations99
US5908509AJun 1, 1999
Semiconductor wafer cleaning system
VERTEQ INC106 citations98
US5656097AAug 12, 1997
Semiconductor wafer cleaning system
VERTEQ INC263 citations98
US5037481AAug 6, 1991
Megasonic cleaning method
VERTEQ INC122 citations98
US6295999B1Oct 2, 2001
Wafer cleaning method
VERTEQ INC63 citations97
US6140744AOct 31, 2000
Wafer cleaning system
VERTEQ INC67 citations97
US6684891B2Feb 3, 2004
Wafer cleaning
VERTEQ INC24 citations96
US6681782B2Jan 27, 2004
Wafer cleaning
VERTEQ INC26 citations96
US6463938B2Oct 15, 2002
Wafer cleaning method
VERTEQ INC45 citations96
US6378534B1Apr 30, 2002
Semiconductor wafer cleaning system
VERTEQ INC60 citations96
US5996595ADec 7, 1999
Semiconductor wafer cleaning system
VERTEQ INC46 citations96
US5950645ASep 14, 1999
Semiconductor wafer cleaning system
VERTEQ INC48 citations96
US5556479ASep 17, 1996
Method and apparatus for drying semiconductor wafers
VERTEQ INC89 citations96
US5534076AJul 9, 1996
Megasonic cleaning system
VERTEQ INC77 citations96
US5365960ANov 22, 1994
Megasonic transducer assembly
VERTEQ INC96 citations96
US4998549AMar 12, 1991
Megasonic cleaning apparatus
VERTEQ INC91 citations96
US4804007AFeb 14, 1989
Cleaning apparatus
VERTEQ INC122 citations96
US5539995AJul 30, 1996
Continuous flow vapor dryer system
VERTEQ INC29 citations93
US6679272B2Jan 20, 2004
Megasonic probe energy attenuator
VERTEQ INC37 citations92
US6122837ASep 26, 2000
Centrifugal wafer processor and method
VERTEQ INC30 citations92
AKRION TECHNOLOGIES INC
6 patentsUS7518288B2Apr 14, 2009
System for megasonic processing of an article
AKRION TECHNOLOGIES INC8 citations92
US7268469B2Sep 11, 2007
Transducer assembly for megasonic processing of an article and apparatus utilizing the same
AKRION TECHNOLOGIES INC4 citations74
US7211932B2May 1, 2007
Apparatus for megasonic processing of an article
AKRION TECHNOLOGIES INC5 citations74
US7117876B2Oct 10, 2006
Method of cleaning a side of a thin flat substrate by applying sonic energy to the opposite side of the substrate
AKRION TECHNOLOGIES INC5 citations74
US7185661B2Mar 6, 2007
Reciprocating megasonic probe
AKRION TECHNOLOGIES INC5 citations63
US7287537B2Oct 30, 2007
Megasonic probe energy director
AKRION TECHNOLOGIES INC1 citations52