Inventor

PFEIFFER GALEN L

US42 patents

⚠️ This page may combine multiple inventors who share the name “PFEIFFER GALEN L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PFEIFFER GALEN L

J A WOOLLAM CO INC

Spectroscopic ellipsometer and polarimeter systems

System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiation

Spectroscopic ellipsometer and polarimeter systems

Spectrophotometer, ellipsometer, polarimeter and the like systems

Fast sample height, AOI and POI alignment in mapping ellipsometer or the like

System and method for setting and compensating errors in AOI and POI of a beam of EM radiation

System for controlling intensity of a beam of electromagnetic radiation and method for investigating materials with low specular reflectance and/or are depolarizing

Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems

Beam focusing and reflecting optics with enhanced detector system

Beam focusing and beam collecting optics with wavelength dependent filter element adjustment of beam area

Beam focusing and beam collecting optics

Reflective focusing optics

Small volume cell

Alignment of ellipsometer beam to sample surface

Reflectometer, spectrophotometer, ellipsometer or polarimeter system including sample imaging system that simultaneously meets scheimpflug condition and overcomes keystone error

System for, and calibration and testing of directed beam ellipsometer systems

System for, and calibration and testing of directed beam ellipsometer systems

Beam focusing and reflective optics

System and method for controlling intensity of a beam of electromagnetic radiation in ellipsometers and polarimeters

System for reducing stress induced effects during determination of fluid optical constants

Aspects of producing, directing, conditioning, impinging and detecting spectroscopic electromagnetic radiation from small spots on samples

System for implementing variable retarder capability in ellipsometer, polarimeter or the like systems

System and method of controlling intensity of an electromagnetic beam

Beam chromatic shifting and directing means

Spectrophotometer, ellipsometer, polarimeter and the like systems

Ellipsometer or polarimeter and the like system with beam chromatic shifting and directing means

Beam focusing and reflective optics

Control of uncertain angle of incidence of beam from Arc lamp

System for determining average ellipsometric parameters for planar or non-planar shaped objects, and method of its use

LIPHARDT MARTIN M

System for viewing samples that are undergoing ellipsometric investigation in real time

Fast sample height, AOI and POI alignment in mapping ellipsometer or the like

DLP base small spot investigation system

Reflectometer, spectrophotometer, ellipsometer or polarimeter system including sample imaging system that simultaneously meet the scheimpflug condition and overcomes keystone error

System for viewing samples that are undergoing ellipsometric investigation in real time

PFEIFFER GALEN L

Small volume cell

In line ellipsometer system and method of use

Small volume cell

Small volume cell

JAMES D WELCH

Spectroscopic ellipsometer and polarimeter systems

HOVORKA GRIFFIN A P

Theta-theta sample positioning stage with application to sample mapping using reflectometer, spectrophotometer or ellipsometer system

J A WOOLIAM CO INC

System for and method of investigating the exact same point on a sample substrate with multiple wavelengths

HASSLER CHRISTOPHER D

Ellipsometer or polarimeter system having at least one rotating element which is driven by a motor comprising air bearing