Inventor
SHANMUGASUNDRAM ARULKUMAR P
US16 patents
⚠️ This page may combine multiple inventors who share the name “SHANMUGASUNDRAM ARULKUMAR P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
14 patentsUS7783375B2Aug 24, 2010
Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing
APPLIED MATERIALS INC42 citations96
US7725208B2May 25, 2010
Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing
APPLIED MATERIALS INC40 citations96
US7160739B2Jan 9, 2007
Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles
APPLIED MATERIALS INC58 citations96
US6913938B2Jul 5, 2005
Feedback control of plasma-enhanced chemical vapor deposition processes
APPLIED MATERIALS INC115 citations96
US7201936B2Apr 10, 2007
Method of feedback control of sub-atmospheric chemical vapor deposition processes
APPLIED MATERIALS INC59 citations95
US6999836B2Feb 14, 2006
Method, system, and medium for handling misrepresentative metrology data within an advanced process control system
APPLIED MATERIALS INC60 citations95
US7337019B2Feb 26, 2008
Integration of fault detection with run-to-run control
APPLIED MATERIALS INC65 citations94
US7082345B2Jul 25, 2006
Method, system and medium for process control for the matching of tools, chambers and/or other semiconductor-related entities
APPLIED MATERIALS INC100 citations94
US7698012B2Apr 13, 2010
Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing
APPLIED MATERIALS INC19 citations92
US7047099B2May 16, 2006
Integrating tool, module, and fab level control
APPLIED MATERIALS INC45 citations92
US7272459B2Sep 18, 2007
Method, system and medium for controlling manufacture process having multivariate input parameters
APPLIED MATERIALS INC42 citations90
US7966087B2Jun 21, 2011
Method, system and medium for controlling manufacture process having multivariate input parameters
APPLIED MATERIALS INC10 citations82
US7668702B2Feb 23, 2010
Method, system and medium for controlling manufacturing process using adaptive models based on empirical data
APPLIED MATERIALS INC7 citations73
US7970588B2Jun 28, 2011
Method, system and medium for controlling manufacturing process using adaptive models based on empirical data
APPLIED MATERIALS INC2 citations62
SHANMUGASUNDRAM ARULKUMAR P
2 patentsUS8694145B2Apr 8, 2014
Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles
SHANMUGASUNDRAM ARULKUMAR P6 citations82
US8070909B2Dec 6, 2011
Feedback control of chemical mechanical polishing device providing manipulation of removal rate profiles
SHANMUGASUNDRAM ARULKUMAR P13 citations82