Inventor
SCHWARM ALEXANDER T
US33 patents
⚠️ This page may combine multiple inventors who share the name “SCHWARM ALEXANDER T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
24 patentsUS7356377B2Apr 8, 2008
System, method, and medium for monitoring performance of an advanced process control system
APPLIED MATERIALS INC63 citations98
US7333871B2Feb 19, 2008
Automated design and execution of experiments with integrated model creation for semiconductor manufacturing tools
APPLIED MATERIALS INC62 citations98
US7783375B2Aug 24, 2010
Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing
APPLIED MATERIALS INC42 citations96
US7725208B2May 25, 2010
Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing
APPLIED MATERIALS INC40 citations96
US7160739B2Jan 9, 2007
Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles
APPLIED MATERIALS INC58 citations96
US6913938B2Jul 5, 2005
Feedback control of plasma-enhanced chemical vapor deposition processes
APPLIED MATERIALS INC115 citations96
US7201936B2Apr 10, 2007
Method of feedback control of sub-atmospheric chemical vapor deposition processes
APPLIED MATERIALS INC59 citations95
US6999836B2Feb 14, 2006
Method, system, and medium for handling misrepresentative metrology data within an advanced process control system
APPLIED MATERIALS INC60 citations95
US7337019B2Feb 26, 2008
Integration of fault detection with run-to-run control
APPLIED MATERIALS INC65 citations94
US7082345B2Jul 25, 2006
Method, system and medium for process control for the matching of tools, chambers and/or other semiconductor-related entities
APPLIED MATERIALS INC100 citations94
US7698012B2Apr 13, 2010
Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing
APPLIED MATERIALS INC19 citations92
US7047099B2May 16, 2006
Integrating tool, module, and fab level control
APPLIED MATERIALS INC45 citations92
US7937179B2May 3, 2011
Dynamic inline yield analysis and prediction of a defect limited yield using inline inspection defects
APPLIED MATERIALS INC24 citations91
US7831326B2Nov 9, 2010
Graphical user interface for presenting multivariate fault contributions
APPLIED MATERIALS INC19 citations91
US7596718B2Sep 29, 2009
Ranged fault signatures for fault diagnosis
APPLIED MATERIALS INC30 citations90
US7587296B2Sep 8, 2009
Adaptive multivariate fault detection
APPLIED MATERIALS INC28 citations90
US7272459B2Sep 18, 2007
Method, system and medium for controlling manufacture process having multivariate input parameters
APPLIED MATERIALS INC42 citations90
US8010321B2Aug 30, 2011
Metrics independent and recipe independent fault classes
APPLIED MATERIALS INC24 citations89
US7966087B2Jun 21, 2011
Method, system and medium for controlling manufacture process having multivariate input parameters
APPLIED MATERIALS INC10 citations82
US7962864B2Jun 14, 2011
Stage yield prediction
APPLIED MATERIALS INC15 citations82
US7934125B2Apr 26, 2011
Ranged fault signatures for fault diagnosis
APPLIED MATERIALS INC9 citations82
US7765020B2Jul 27, 2010
Graphical user interface for presenting multivariate fault contributions
APPLIED MATERIALS INC12 citations82
US7668702B2Feb 23, 2010
Method, system and medium for controlling manufacturing process using adaptive models based on empirical data
APPLIED MATERIALS INC7 citations73
US7970588B2Jun 28, 2011
Method, system and medium for controlling manufacturing process using adaptive models based on empirical data
APPLIED MATERIALS INC2 citations62
DUN & BRADSTREET CORP
3 patentsUS11386336B2Jul 12, 2022
Machine learning classifier and prediction engine for artificial intelligence optimized prospect determination on win/loss classification
DUN & BRADSTREET CORP1 citations48
US11651253B2May 16, 2023
Machine learning classifier for identifying internet service providers from website tracking
DUN & BRADSTREET CORP0 citations39
US11238233B2Feb 1, 2022
Artificial intelligence engine for generating semantic directions for websites for automated entity targeting to mapped identities
DUN & BRADSTREET CORP0 citations39
SHANMUGASUNDRAM ARULKUMAR P
2 patentsUS8694145B2Apr 8, 2014
Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles
SHANMUGASUNDRAM ARULKUMAR P6 citations82
US8070909B2Dec 6, 2011
Feedback control of chemical mechanical polishing device providing manipulation of removal rate profiles
SHANMUGASUNDRAM ARULKUMAR P13 citations82