P

Inventor

SCHWARM ALEXANDER T

US33 patents
⚠️ This page may combine multiple inventors who share the name “SCHWARM ALEXANDER T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

24 patents
US7356377B2Apr 8, 2008

System, method, and medium for monitoring performance of an advanced process control system

APPLIED MATERIALS INC63 citations98
US7333871B2Feb 19, 2008

Automated design and execution of experiments with integrated model creation for semiconductor manufacturing tools

APPLIED MATERIALS INC62 citations98
US7783375B2Aug 24, 2010

Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing

APPLIED MATERIALS INC42 citations96
US7725208B2May 25, 2010

Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing

APPLIED MATERIALS INC40 citations96
US7160739B2Jan 9, 2007

Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles

APPLIED MATERIALS INC58 citations96
US6913938B2Jul 5, 2005

Feedback control of plasma-enhanced chemical vapor deposition processes

APPLIED MATERIALS INC115 citations96
US7201936B2Apr 10, 2007

Method of feedback control of sub-atmospheric chemical vapor deposition processes

APPLIED MATERIALS INC59 citations95
US6999836B2Feb 14, 2006

Method, system, and medium for handling misrepresentative metrology data within an advanced process control system

APPLIED MATERIALS INC60 citations95
US7337019B2Feb 26, 2008

Integration of fault detection with run-to-run control

APPLIED MATERIALS INC65 citations94
US7082345B2Jul 25, 2006

Method, system and medium for process control for the matching of tools, chambers and/or other semiconductor-related entities

APPLIED MATERIALS INC100 citations94
US7698012B2Apr 13, 2010

Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing

APPLIED MATERIALS INC19 citations92
US7047099B2May 16, 2006

Integrating tool, module, and fab level control

APPLIED MATERIALS INC45 citations92
US7937179B2May 3, 2011

Dynamic inline yield analysis and prediction of a defect limited yield using inline inspection defects

APPLIED MATERIALS INC24 citations91
US7831326B2Nov 9, 2010

Graphical user interface for presenting multivariate fault contributions

APPLIED MATERIALS INC19 citations91
US7596718B2Sep 29, 2009

Ranged fault signatures for fault diagnosis

APPLIED MATERIALS INC30 citations90
US7587296B2Sep 8, 2009

Adaptive multivariate fault detection

APPLIED MATERIALS INC28 citations90
US7272459B2Sep 18, 2007

Method, system and medium for controlling manufacture process having multivariate input parameters

APPLIED MATERIALS INC42 citations90
US8010321B2Aug 30, 2011

Metrics independent and recipe independent fault classes

APPLIED MATERIALS INC24 citations89
US7966087B2Jun 21, 2011

Method, system and medium for controlling manufacture process having multivariate input parameters

APPLIED MATERIALS INC10 citations82
US7962864B2Jun 14, 2011

Stage yield prediction

APPLIED MATERIALS INC15 citations82
US7934125B2Apr 26, 2011

Ranged fault signatures for fault diagnosis

APPLIED MATERIALS INC9 citations82
US7765020B2Jul 27, 2010

Graphical user interface for presenting multivariate fault contributions

APPLIED MATERIALS INC12 citations82
US7668702B2Feb 23, 2010

Method, system and medium for controlling manufacturing process using adaptive models based on empirical data

APPLIED MATERIALS INC7 citations73
US7970588B2Jun 28, 2011

Method, system and medium for controlling manufacturing process using adaptive models based on empirical data

APPLIED MATERIALS INC2 citations62

DUN & BRADSTREET CORP

3 patents

SHANMUGASUNDRAM ARULKUMAR P

2 patents

NEHMADI YOUVAL

1 patent

PARIKH SUKETU ARUN

1 patent

SCHWARM ALEXANDER T

1 patent

SVIDENKO VICKY

1 patent