P

Inventor

BROWN KYLE A

US45 patents
⚠️ This page may combine multiple inventors who share the name “BROWN KYLE A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR TECH CORP

22 patents
US7139083B2Nov 21, 2006

Methods and systems for determining a composition and a thickness of a specimen

KLA TENCOR TECH CORP68 citations99
US6891627B1May 10, 2005

Methods and systems for determining a critical dimension and overlay of a specimen

KLA TENCOR TECH CORP192 citations99
US6694284B1Feb 17, 2004

Methods and systems for determining at least four properties of a specimen

KLA TENCOR TECH CORP211 citations99
US7751046B2Jul 6, 2010

Methods and systems for determining a critical dimension and overlay of a specimen

KLA TENCOR TECH CORP79 citations98
US7106425B1Sep 12, 2006

Methods and systems for determining a presence of defects and a thin film characteristic of a specimen

KLA TENCOR TECH CORP71 citations98
US6919957B2Jul 19, 2005

Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen

KLA TENCOR TECH CORP110 citations98
US6782337B2Aug 24, 2004

Methods and systems for determining a critical dimension an a presence of defects on a specimen

KLA TENCOR TECH CORP85 citations98
US6987572B2Jan 17, 2006

Methods and systems for lithography process control

KLA TENCOR TECH CORP143 citations97
US6917433B2Jul 12, 2005

Methods and systems for determining a property of a specimen prior to, during, or subsequent to an etch process

KLA TENCOR TECH CORP61 citations97
US6806951B2Oct 19, 2004

Methods and systems for determining at least one characteristic of defects on at least two sides of a specimen

KLA TENCOR TECH CORP65 citations97
US7196782B2Mar 27, 2007

Methods and systems for determining a thin film characteristic and an electrical property of a specimen

KLA TENCOR TECH CORP56 citations96
US7006235B2Feb 28, 2006

Methods and systems for determining overlay and flatness of a specimen

KLA TENCOR TECH CORP48 citations96
US6950196B2Sep 27, 2005

Methods and systems for determining a thickness of a structure on a specimen and at least one additional property of the specimen

KLA TENCOR TECH CORP50 citations96
US6917419B2Jul 12, 2005

Methods and systems for determining flatness, a presence of defects, and a thin film characteristic of a specimen

KLA TENCOR TECH CORP51 citations96
US6891610B2May 10, 2005

Methods and systems for determining an implant characteristic and a presence of defects on a specimen

KLA TENCOR TECH CORP48 citations96
US6818459B2Nov 16, 2004

Methods and systems for determining a presence of macro defects and overlay of a specimen

KLA TENCOR TECH CORP48 citations96
US6689519B2Feb 10, 2004

Methods and systems for lithography process control

KLA TENCOR TECH CORP75 citations96
US7460981B2Dec 2, 2008

Methods and systems for determining a presence of macro and micro defects on a specimen

KLA TENCOR TECH CORP11 citations93
US7349090B2Mar 25, 2008

Methods and systems for determining a property of a specimen prior to, during, or subsequent to lithography

KLA TENCOR TECH CORP24 citations93
US7130029B2Oct 31, 2006

Methods and systems for determining an adhesion characteristic and a thickness of a specimen

KLA TENCOR TECH CORP27 citations93
US7767956B2Aug 3, 2010

Methods and systems for lithography process control

KLA TENCOR TECH CORP1 citations61
US7462814B2Dec 9, 2008

Methods and systems for lithography process control

KLA TENCOR TECH CORP1 citations61

PROCTER & GAMBLE

7 patents

KLA TENCOR TECHNOLOGIES

3 patents

APPLIED MATERIALS INC

3 patents

LEVY ADY

2 patents

VERTEX AEROSPACE LLC

2 patents

K L A TENCOR TECHNOLOGIES

1 patent

KLA TENCOR INC

1 patent

(unassigned)

1 patent

FELDMEIER EQUIPMENT INC

1 patent

KLA TENCOR CORP

1 patent

BROWN KYLE A

1 patent