Inventor

NIKOONAHAD MEHRDAD

US71 patents

⚠️ This page may combine multiple inventors who share the name “NIKOONAHAD MEHRDAD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKOONAHAD MEHRDAD

KLA TENCOR TECH CORP

Methods and systems for determining a composition and a thickness of a specimen

Methods and systems for determining a critical dimension and overlay of a specimen

Methods and systems for determining at least four properties of a specimen

Methods and systems for determining a critical dimension and overlay of a specimen

Optical system for measuring samples using short wavelength radiation

Methods and systems for determining a presence of defects and a thin film characteristic of a specimen

Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen

Methods and systems for determining a critical dimension an a presence of defects on a specimen

Metrology system using optical phase

Parametric profiling using optical spectroscopic systems

Methods and systems for determining a property of a specimen prior to, during, or subsequent to an etch process

Methods and systems for determining at least one characteristic of defects on at least two sides of a specimen

Methods and systems for determining a thin film characteristic and an electrical property of a specimen

System for scatterometric measurements and applications

Methods and systems for determining overlay and flatness of a specimen

Methods and systems for determining a thickness of a structure on a specimen and at least one additional property of the specimen

Methods and systems for determining flatness, a presence of defects, and a thin film characteristic of a specimen

Parametric profiling using optical spectroscopic systems

Methods and systems for determining an implant characteristic and a presence of defects on a specimen

Methods and systems for determining a presence of macro defects and overlay of a specimen

Overlay error detection

Methods and systems for determining a presence of macro and micro defects on a specimen

Methods and systems for determining a property of a specimen prior to, during, or subsequent to lithography

Methods and systems for determining an adhesion characteristic and a thickness of a specimen

System for MEMS inspection and characterization

KLA TENCOR CORP

System for measuring polarimetric spectrum and other properties of a sample

System for non-destructive measurement of samples

Scanning system for inspecting anomalies on surfaces

System for measuring polarimetric spectrum and other properties of a sample

Scanning system for inspecting anomalies on surfaces

In-situ metalization monitoring using eddy current and optical measurements

Optical scanning system for surface inspection

Parametric profiling using optical spectroscopic systems

System for analyzing surface characteristics with self-calibrating capability

Surface inspection system

Non-contact system for measuring film thickness

Optical scanning system for surface inspection

Surface inspection system with misregistration error correction and adaptive illumination

Scanning system for inspecting anamolies on surfaces

Detection of film thickness through induced acoustic pulse-echos

KLA TENCOR TECHNOLOGIES

Methods and systems for determining a critical dimension and a thin film characteristic of a specimen

Methods and systems for determining a presence of macro defects and overlay of a specimen

Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition process

TENCOR INSTRUMENTS

Variable spot-size scanning apparatus

(unassigned)

System for analyzing surface characteristics with self-calibrating capability

LEVY ADY

Methods and systems for determining a critical dimension and overlay of a specimen

K L A TENCOR TECHNOLOGIES

Methods and systems for determining a presence of macro and micro defects on a specimen

KLA TENCOR INC

Methods and systems for determining a characteristic of a specimen prior to, during, or subsequent to ion implantation

KLA TENCOR

Apparatus and methods for performing self-clearing optical measurements

KLA TECHNOLOGIES CORP

Systems for measuring periodic structures