Inventor

WACK DAN

US38 patents

⚠️ This page may combine multiple inventors who share the name “WACK DAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WACK DAN

KLA TENCOR TECH CORP

Methods and systems for determining a composition and a thickness of a specimen

Methods and systems for determining a critical dimension and overlay of a specimen

Methods and systems for determining at least four properties of a specimen

Methods and systems for determining a critical dimension and overlay of a specimen

Apparatus and methods for detecting overlay errors using scatterometry

Methods and systems for determining a presence of defects and a thin film characteristic of a specimen

Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen

Methods and systems for determining a critical dimension an a presence of defects on a specimen

Methods and systems for determining a property of a specimen prior to, during, or subsequent to an etch process

Methods and systems for determining at least one characteristic of defects on at least two sides of a specimen

Overlay marks and methods of manufacturing such marks

Apparatus and methods for detecting overlay errors using scatterometry

Methods and systems for determining a thin film characteristic and an electrical property of a specimen

Overlay marks, methods of overlay mark design and methods of overlay measurements

Methods and systems for determining overlay and flatness of a specimen

Methods and systems for determining a thickness of a structure on a specimen and at least one additional property of the specimen

Methods and systems for determining flatness, a presence of defects, and a thin film characteristic of a specimen

Methods and systems for determining an implant characteristic and a presence of defects on a specimen

Methods and systems for determining a presence of macro defects and overlay of a specimen

Systems and methods for measuring one or more characteristics of patterned features on a specimen

Methods and systems for determining a presence of macro and micro defects on a specimen

Methods and systems for determining a property of a specimen prior to, during, or subsequent to lithography

Overlay marks, methods of overlay mark design and methods of overlay measurements

Methods and systems for determining an adhesion characteristic and a thickness of a specimen

Apparatus and methods for detecting overlay errors using scatterometry

Apparatus and methods for detecting overlay errors using scatterometry

KLA TENCOR CORP

Overlay marks, methods of overlay mark design and methods of overlay measurements

Overlay marks, methods of overlay mark design and methods of overlay measurements

Apparatus for measuring overlay errors

KLA TENCOR TECHNOLOGIES

Methods and systems for determining a critical dimension and a thin film characteristic of a specimen

Methods and systems for determining a presence of macro defects and overlay of a specimen

Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition process

LEVY ADY

Methods and systems for determining a critical dimension and overlay of a specimen

Methods and systems for determining a critical dimension and overlay of a specimen

GHINOVKER MARK

Overlay marks, methods of overlay mark design and methods of overlay measurements

K L A TENCOR TECHNOLOGIES

Methods and systems for determining a presence of macro and micro defects on a specimen

KLA TENCOR INC

Methods and systems for determining a characteristic of a specimen prior to, during, or subsequent to ion implantation

KLA CORP

Common path mode fiber tip diffraction interferometer for wavefront measurement