Inventor
VAN DER TOORN JAN-GERARD CORNE
NL8 patents
Patents
8 patentsUS7352434B2Apr 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV178 citations98
US7119876B2Oct 10, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV83 citations97
US7403261B2Jul 22, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations92
US7468779B2Dec 23, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations84
US7295283B2Nov 13, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV16 citations80
US7633073B2Dec 15, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations72
US7330238B2Feb 12, 2008
Lithographic apparatus, immersion projection apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations71
US7170582B2Jan 30, 2007
Support device and lightographic apparatus
ASML NETHERLANDS BV2 citations60