Inventor
BUTLER HANS
NL154 patents
⚠️ This page may combine multiple inventors who share the name “BUTLER HANS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
36 patentsUS7593092B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV60 citations99
US7593093B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV67 citations99
US7213963B2May 8, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV196 citations99
US7199858B2Apr 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV409 citations99
US6741331B2May 25, 2004
Lithographic apparatus with improved exposure area focus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV72 citations97
US9740107B2Aug 22, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations93
US9366972B2Jun 14, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations93
US6727977B2Apr 27, 2004
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV22 citations93
US7113256B2Sep 26, 2006
Lithographic apparatus and device manufacturing method with feed-forward focus control
ASML NETHERLANDS BV35 citations91
US8044373B2Oct 25, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations84
US7468782B2Dec 23, 2008
Lithographic apparatus, position quantity controller and control method with feedforward signal
ASML NETHERLANDS BV14 citations84
US7468589B2Dec 23, 2008
Lithographic apparatus having a controlled motor, and motor control system and method
ASML NETHERLANDS BV10 citations84
US7382439B2Jun 3, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations84
US7348752B1Mar 25, 2008
Stage apparatus and lithographic apparatus
ASML NETHERLANDS BV14 citations84
US7126674B2Oct 24, 2006
Positioning device and device manufacturing method
ASML NETHERLANDS BV12 citations84
US7098990B2Aug 29, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV12 citations84
US7084958B2Aug 1, 2006
Lithographic apparatus, control system and device manufacturing method
ASML NETHERLANDS BV14 citations84
US10466599B2Nov 5, 2019
Lithographic apparatus
ASML NETHERLANDS BV4 citations83
US7256866B2Aug 14, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV11 citations83
US7760324B2Jul 20, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV19 citations82
US7538273B2May 26, 2009
Cable connection to decrease the passing on of vibrations from a first object to a second object
ASML NETHERLANDS BV8 citations82
US7193722B2Mar 20, 2007
Lithographic apparatus with disturbance correction system and device manufacturing method
ASML NETHERLANDS BV12 citations82
US7190437B2Mar 13, 2007
Wireless signaling in a lithographic apparatus
ASML NETHERLANDS BV12 citations82
US7352149B2Apr 1, 2008
Method for controlling the position of a movable object, a positioning system, and a lithographic apparatus
ASML NETHERLANDS BV12 citations80
US7209219B2Apr 24, 2007
System for controlling a position of a mass
ASML NETHERLANDS BV8 citations74
US6798497B2Sep 28, 2004
Lithographic projection apparatus, device manufacturing method, device manufactured thereby, and measurement method
ASML NETHERLANDS BV8 citations74
US11150560B2Oct 19, 2021
Projection system and mirror and radiation source for a lithographic apparatus
ASML NETHERLANDS BV1 citations73
US10732511B2Aug 4, 2020
Projection system and mirror and radiation source for a lithographic apparatus
ASML NETHERLANDS BV1 citations73
US10503084B2Dec 10, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US10216093B2Feb 26, 2019
Projection system and minor and radiation source for a lithographic apparatus
ASML NETHERLANDS BV1 citations73
US11940739B2Mar 26, 2024
Metrology apparatus
ASML NETHERLANDS BV1 citations72
US11262661B2Mar 1, 2022
Metrology apparatus
ASML NETHERLANDS BV4 citations72
US10976675B2Apr 13, 2021
Lithographic apparatus
ASML NETHERLANDS BV1 citations72
US10209634B2Feb 19, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations72
US9696630B2Jul 4, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations71
US7330238B2Feb 12, 2008
Lithographic apparatus, immersion projection apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations71
BUTLER HANS
7 patentsUS8319940B2Nov 27, 2012
Position measurement system and lithographic apparatus
BUTLER HANS18 citations92
US8705004B2Apr 22, 2014
Lithographic method and apparatus
BUTLER HANS20 citations89
US8164737B2Apr 24, 2012
Lithographic apparatus having an active damping subassembly
BUTLER HANS11 citations82
US9229339B2Jan 5, 2016
Positioning system, a lithographic apparatus and a method for positional control
BUTLER HANS4 citations73
US9715171B2Jul 25, 2017
Imprint lithographic apparatus and imprint lithographic method
BUTLER HANS4 citations71
US8730451B2May 20, 2014
Lithographic apparatus for transferring pattern from patterning device onto substrate, and damping method
BUTLER HANS6 citations71
US8144310B2Mar 27, 2012
Positioning system, lithographic apparatus and device manufacturing method
BUTLER HANS5 citations71
LOF JOERI
4 patentsUS8482845B2Jul 9, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI32 citations96
US8154708B2Apr 10, 2012
Lithographic apparatus and device manufacturing method
LOF JOERI23 citations92
US8472002B2Jun 25, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI7 citations84
US8558989B2Oct 15, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI3 citations74
ASM LITHOGRAPHY BV
1 patentZEISS CARL SMT GMBH
1 patentSTAALS FRANK
1 patentShowing the top 50 of 154 patents by PatentIndex Score.