Inventor
COX HENRIKUS HERMAN MARIE
NL70 patents
⚠️ This page may combine multiple inventors who share the name “COX HENRIKUS HERMAN MARIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
43 patentsUS7483120B2Jan 27, 2009
Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method
ASML NETHERLANDS BV121 citations98
US7352434B2Apr 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV178 citations98
US7119874B2Oct 10, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV143 citations98
US7710540B2May 4, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV94 citations97
US7936444B2May 3, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV35 citations96
US7701550B2Apr 20, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV45 citations96
US7602470B2Oct 13, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV20 citations95
US8031325B2Oct 4, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV13 citations92
US7486381B2Feb 3, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations92
US7145269B2Dec 5, 2006
Lithographic apparatus, Lorentz actuator, and device manufacturing method
ASML NETHERLANDS BV30 citations92
US7359032B2Apr 15, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV17 citations90
US6906786B2Jun 14, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV23 citations90
US7205741B2Apr 17, 2007
Planar motor initialization method, planar motor, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV27 citations89
US9798246B2Oct 24, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations84
US9488923B2Nov 8, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations84
US9477160B2Oct 25, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US7468589B2Dec 23, 2008
Lithographic apparatus having a controlled motor, and motor control system and method
ASML NETHERLANDS BV10 citations84
US7327437B2Feb 5, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations84
US7292317B2Nov 6, 2007
Lithographic apparatus and device manufacturing method utilizing substrate stage compensating
ASML NETHERLANDS BV13 citations84
US7245047B2Jul 17, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations84
US7782446B2Aug 24, 2010
Stage system and lithographic apparatus comprising such stage system
ASML NETHERLANDS BV13 citations83
US7256866B2Aug 14, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV11 citations83
US7193722B2Mar 20, 2007
Lithographic apparatus with disturbance correction system and device manufacturing method
ASML NETHERLANDS BV12 citations82
US7295283B2Nov 13, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV16 citations80
US7167234B2Jan 23, 2007
Actuator assembly and lithographic apparatus comprising such an actuator assembly
ASML NETHERLANDS BV7 citations74
US7019816B2Mar 28, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV8 citations74
US9977341B2May 22, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US7417711B2Aug 26, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations73
US7239369B2Jul 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV7 citations73
US10222707B2Mar 5, 2019
Lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV3 citations72
US7330238B2Feb 12, 2008
Lithographic apparatus, immersion projection apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations71
US7016019B2Mar 21, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations71
US7005823B2Feb 28, 2006
Positioning system and positioning method
ASML NETHERLANDS BV9 citations69
US7170583B2Jan 30, 2007
Lithographic apparatus immersion damage control
ASML NETHERLANDS BV8 citations68
US7016013B2Mar 21, 2006
Modulated lithographic beam to reduce sensitivity to fluctuating scanning speed
ASML NETHERLANDS BV7 citations65
US7265813B2Sep 4, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations63
US7170580B2Jan 30, 2007
Lithographic apparatus, projection system, method of projecting and device manufacturing method
ASML NETHERLANDS BV5 citations63
US10705439B2Jul 7, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations62
US8368868B2Feb 5, 2013
Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless
ASML NETHERLANDS BV2 citations62
US7492440B2Feb 17, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations62
US7079226B2Jul 18, 2006
Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV2 citations62
US7456935B2Nov 25, 2008
Lithographic apparatus and device manufacturing method utilizing a positioning device for positioning an object table
ASML NETHERLANDS BV3 citations61
US9746788B2Aug 29, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations58
KEMPER NICOLAAS RUDOLF
3 patentsUS8446563B2May 21, 2013
Lithographic apparatus and device manufacturing method
KEMPER NICOLAAS RUDOLF6 citations83
US8755028B2Jun 17, 2014
Lithographic apparatus and device manufacturing method
KEMPER NICOLAAS RUDOLF0 citations62
US9097992B2Aug 4, 2015
Lithographic apparatus and device manufacturing method
KEMPER NICOLAAS RUDOLF0 citations59
BUTLER HANS
1 patentLAFARRE RAYMOND WILHELMUS LOUIS
1 patentSTREEFKERK BOB
1 patentCOX HENRIKUS HERMAN MARIE
1 patentShowing the top 50 of 70 patents by PatentIndex Score.