Inventor
DRAAIJER EVERT HENDRIK JAN
NL5 patents
Patents
5 patentsUS7330238B2Feb 12, 2008
Lithographic apparatus, immersion projection apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations71
US9977349B2May 22, 2018
Support device, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations65
US7148950B2Dec 12, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations57
US7859644B2Dec 28, 2010
Lithographic apparatus, immersion projection apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US7352436B2Apr 1, 2008
Lithographic apparatus, projection apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations35