Inventor
DULKIN ALEXANDER
US11 patents
⚠️ This page may combine multiple inventors who share the name “DULKIN ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
7 patentsUS6566246B1May 20, 2003
Deposition of conformal copper seed layers by control of barrier layer morphology
NOVELLUS SYSTEMS INC147 citations97
US7922880B1Apr 12, 2011
Method and apparatus for increasing local plasma density in magnetically confined plasma
NOVELLUS SYSTEMS INC67 citations96
US7645696B1Jan 12, 2010
Deposition of thin continuous PVD seed layers having improved adhesion to the barrier layer
NOVELLUS SYSTEMS INC56 citations95
US7855147B1Dec 21, 2010
Methods and apparatus for engineering an interface between a diffusion barrier layer and a seed layer
NOVELLUS SYSTEMS INC39 citations91
US7745332B1Jun 29, 2010
PVD-based metallization methods for fabrication of interconnections in semiconductor devices
NOVELLUS SYSTEMS INC24 citations90
US7964504B1Jun 21, 2011
PVD-based metallization methods for fabrication of interconnections in semiconductor devices
NOVELLUS SYSTEMS INC37 citations88
US8343318B2Jan 1, 2013
Magnetic lensing to improve deposition uniformity in a physical vapor deposition (PVD) process
NOVELLUS SYSTEMS INC1 citations52
LAM RES CORP
3 patentsUS10153282B1Dec 11, 2018
Ultra-high vacuum transport and storage
LAM RES CORP3 citations69
US11832533B2Nov 28, 2023
Conformal damage-free encapsulation of chalcogenide materials
LAM RES CORP0 citations60
US11239420B2Feb 1, 2022
Conformal damage-free encapsulation of chalcogenide materials
LAM RES CORP1 citations60