Inventor
VIJAYENDRAN ANIL
US6 patents
⚠️ This page may combine multiple inventors who share the name “VIJAYENDRAN ANIL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
3 patentsUS7645696B1Jan 12, 2010
Deposition of thin continuous PVD seed layers having improved adhesion to the barrier layer
NOVELLUS SYSTEMS INC56 citations95
US6797642B1Sep 28, 2004
Method to improve barrier layer adhesion
NOVELLUS SYSTEMS INC42 citations90
US7199048B2Apr 3, 2007
Method for preventing metalorganic precursor penetration into porous dielectrics
NOVELLUS SYSTEMS INC9 citations71