Inventor
BUTLER STEPHANIE W
US10 patents
Patents
10 patentsUS5864773AJan 26, 1999
Virtual sensor based monitoring and fault detection/classification system and method for semiconductor processing equipment
TEXAS INSTRUMENTS INC259 citations96
US5503707AApr 2, 1996
Method and apparatus for process endpoint prediction based on actual thickness measurements
TEXAS INSTRUMENTS INC124 citations94
US5402367AMar 28, 1995
Apparatus and method for model based process control
TEXAS INSTRUMENTS INC164 citations93
US5399229AMar 21, 1995
System and method for monitoring and evaluating semiconductor wafer fabrication
TEXAS INSTRUMENTS INC71 citations93
US6808997B2Oct 26, 2004
Complementary junction-narrowing implants for ultra-shallow junctions
TEXAS INSTRUMENTS INC17 citations92
US5458732AOct 17, 1995
Method and system for identifying process conditions
TEXAS INSTRUMENTS INC72 citations92
US7345355B2Mar 18, 2008
Complementary junction-narrowing implants for ultra-shallow junctions
TEXAS INSTRUMENTS INC6 citations73
US7704883B2Apr 27, 2010
Annealing to improve edge roughness in semiconductor technology
TEXAS INSTRUMENTS INC4 citations61
US7793186B1Sep 7, 2010
System and method for increasing the extent of built-in self-testing of memory and circuitry
TEXAS INSTRUMENTS INC0 citations51
US7752518B2Jul 6, 2010
System and method for increasing the extent of built-in self-testing of memory and circuitry
TEXAS INSTRUMENTS INC0 citations51