Inventor
TEN KATE NICOLAAS
NL134 patents
⚠️ This page may combine multiple inventors who share the name “TEN KATE NICOLAAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
41 patentsUS9442395B2Sep 13, 2016
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV20 citations96
US7701550B2Apr 20, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV45 citations96
US7602470B2Oct 13, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV20 citations95
US7652746B2Jan 26, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV22 citations93
US10898955B2Jan 26, 2021
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV7 citations92
US10245641B2Apr 2, 2019
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV11 citations92
US9737934B2Aug 22, 2017
Substrate holder and method of manufacturing a substrate holder
ASML NETHERLANDS BV9 citations92
US9507274B2Nov 29, 2016
Substrate holder and method of manufacturing a substrate holder
ASML NETHERLANDS BV14 citations92
US8031325B2Oct 4, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV13 citations92
US7804575B2Sep 28, 2010
Lithographic apparatus and device manufacturing method having liquid evaporation control
ASML NETHERLANDS BV23 citations92
US7804577B2Sep 28, 2010
Lithographic apparatus
ASML NETHERLANDS BV26 citations92
US7656501B2Feb 2, 2010
Lithographic apparatus
ASML NETHERLANDS BV22 citations92
US7411654B2Aug 12, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV22 citations92
US7251013B2Jul 31, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV21 citations92
US11960213B2Apr 16, 2024
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV2 citations84
US11628498B2Apr 18, 2023
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV3 citations84
US11376663B2Jul 5, 2022
Substrate holder and method of manufacturing a substrate holder
ASML NETHERLANDS BV4 citations84
US11235388B2Feb 1, 2022
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV4 citations84
US10875096B2Dec 29, 2020
Substrate holder and method of manufacturing a substrate holder
ASML NETHERLANDS BV2 citations84
US9857695B2Jan 2, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9488923B2Nov 8, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations84
US9454089B2Sep 27, 2016
Substrate table, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV4 citations84
US9268238B2Feb 23, 2016
Substrate table, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV4 citations84
US7834974B2Nov 16, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations84
US9507275B2Nov 29, 2016
Support apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations83
US7751027B2Jul 6, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV18 citations82
US7414699B2Aug 19, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations82
US12366808B2Jul 22, 2025
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV0 citations73
US11754929B2Sep 12, 2023
Substrate holder and method of manufacturing a substrate holder
ASML NETHERLANDS BV1 citations73
US11003094B2May 11, 2021
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
ASML NETHERLANDS BV1 citations73
US10955757B2Mar 23, 2021
Substrate table, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV2 citations73
US10866530B2Dec 15, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations73
US10495984B2Dec 3, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations73
US10209629B2Feb 19, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations73
US9927715B2Mar 27, 2018
Lithographic apparatus, cover for use in a lithographic apparatus and method for designing a cover for use in a lithographic apparatus
ASML NETHERLANDS BV2 citations73
US9857696B2Jan 2, 2018
Substrate table, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV2 citations73
US9448494B2Sep 20, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations73
US7411658B2Aug 12, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations73
US7133114B2Nov 7, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations73
US11378893B2Jul 5, 2022
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV2 citations72
US11281115B2Mar 22, 2022
Lithographic apparatus and method
ASML NETHERLANDS BV1 citations72
LEENDERS MARTINUS HENDRIKUS ANTONIUS
1 patentLAFARRE RAYMOND WILHELMUS LOUIS
1 patentTEN KATE NICOLAAS
1 patentCADEE THEODORUS PETRUS MARIA
1 patentKEMPER NICOLAAS RUDOLF
1 patentJACOBS JOHANNES HENRICUS WILHELMUS
1 patentNIENHUYS HAN-KWANG
1 patentBEX JAN
1 patentCLOIN CHRISTIAN GERARDUS NORBERTUS HENDRICUS MARIE
1 patentShowing the top 50 of 134 patents by PatentIndex Score.