Inventor
YU TOM
US4 patents
⚠️ This page may combine multiple inventors who share the name “YU TOM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
3 patentsUS7645696B1Jan 12, 2010
Deposition of thin continuous PVD seed layers having improved adhesion to the barrier layer
NOVELLUS SYSTEMS INC56 citations95
US6471831B2Oct 29, 2002
Apparatus and method for improving film uniformity in a physical vapor deposition system
NOVELLUS SYSTEMS INC14 citations79
US6468404B2Oct 22, 2002
Apparatus and method for reducing redeposition in a physical vapor deposition system
NOVELLUS SYSTEMS INC12 citations71