Inventor
VAN DER MEULEN FRITS
NL46 patents
⚠️ This page may combine multiple inventors who share the name “VAN DER MEULEN FRITS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
35 patentsUS7352434B2Apr 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV178 citations98
US7936444B2May 3, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV35 citations96
US7701550B2Apr 20, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV45 citations96
US7602470B2Oct 13, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV20 citations95
US8031325B2Oct 4, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV13 citations92
US7705962B2Apr 27, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations92
US10539886B2Jan 21, 2020
Pellicle attachment apparatus
ASML NETHERLANDS BV13 citations90
US9798246B2Oct 24, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations84
US9488923B2Nov 8, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations84
US9477160B2Oct 25, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US10558129B2Feb 11, 2020
Mask assembly
ASML NETHERLANDS BV7 citations82
US7791709B2Sep 7, 2010
Substrate support and lithographic process
ASML NETHERLANDS BV11 citations82
US7760324B2Jul 20, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV19 citations82
US7184121B2Feb 27, 2007
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV10 citations82
US7295283B2Nov 13, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV16 citations80
US7133114B2Nov 7, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations73
US10191396B2Jan 29, 2019
Lithographic apparatus, object positioning system and device manufacturing method
ASML NETHERLANDS BV2 citations71
US9946172B2Apr 17, 2018
System for positioning an object in lithography
ASML NETHERLANDS BV2 citations71
US7330238B2Feb 12, 2008
Lithographic apparatus, immersion projection apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations71
US10747127B2Aug 18, 2020
Lithographic apparatus
ASML NETHERLANDS BV5 citations68
US7170583B2Jan 30, 2007
Lithographic apparatus immersion damage control
ASML NETHERLANDS BV8 citations68
US10705439B2Jul 7, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations62
US11009803B2May 18, 2021
Mask assembly
ASML NETHERLANDS BV0 citations60
US11003098B2May 11, 2021
Pellicle attachment apparatus
ASML NETHERLANDS BV0 citations59
US10969701B2Apr 6, 2021
Pellicle attachment apparatus
ASML NETHERLANDS BV0 citations59
US7830495B2Nov 9, 2010
Lithographic apparatus and position sensor
ASML NETHERLANDS BV4 citations58
US11681233B2Jun 20, 2023
Gas mixing for fast temperature control of a cooling hood
ASML NETHERLANDS BV0 citations53
US10599054B2Mar 24, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10466595B2Nov 5, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10331047B2Jun 25, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US9904185B2Feb 27, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US9507278B2Nov 29, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10394140B2Aug 27, 2019
Lithographic apparatus
ASML NETHERLANDS BV0 citations50
US7859644B2Dec 28, 2010
Lithographic apparatus, immersion projection apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US10620552B2Apr 14, 2020
Stage system, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations35
KEMPER NICOLAAS RUDOLF
3 patentsUS8446563B2May 21, 2013
Lithographic apparatus and device manufacturing method
KEMPER NICOLAAS RUDOLF6 citations83
US8755028B2Jun 17, 2014
Lithographic apparatus and device manufacturing method
KEMPER NICOLAAS RUDOLF0 citations62
US9097992B2Aug 4, 2015
Lithographic apparatus and device manufacturing method
KEMPER NICOLAAS RUDOLF0 citations59
STREEFKERK BOB
3 patentsUS8964164B2Feb 24, 2015
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations52
US8724083B2May 13, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations52
US8724084B2May 13, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations52