Inventor
HOUKES MARTIJN
NL17 patents
⚠️ This page may combine multiple inventors who share the name “HOUKES MARTIJN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
12 patentsUS7352434B2Apr 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV178 citations98
US7936444B2May 3, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV35 citations96
US9798246B2Oct 24, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations84
US9477160B2Oct 25, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US7330238B2Feb 12, 2008
Lithographic apparatus, immersion projection apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations71
US7005823B2Feb 28, 2006
Positioning system and positioning method
ASML NETHERLANDS BV9 citations69
US7170583B2Jan 30, 2007
Lithographic apparatus immersion damage control
ASML NETHERLANDS BV8 citations68
US7265813B2Sep 4, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations63
US7630059B2Dec 8, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations62
US7148950B2Dec 12, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations57
US10466595B2Nov 5, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US7859644B2Dec 28, 2010
Lithographic apparatus, immersion projection apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
STREEFKERK BOB
3 patentsUS8964164B2Feb 24, 2015
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations52
US8724084B2May 13, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations52
US8724083B2May 13, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations52