Inventor

SUNG YI-CHANG

TW3 patents

⚠️ This page may combine multiple inventors who share the name “SUNG YI-CHANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

2 patents

US6975407B1Dec 13, 2005

Method of wafer height mapping

TAIWAN SEMICONDUCTOR MFG7 citations71

US7301604B2Nov 27, 2007

Method to predict and identify defocus wafers

TAIWAN SEMICONDUCTOR MFG3 citations58

TSENG KUO-SHU

1 patent

US8215890B2Jul 10, 2012

Semiconductor wafer robot alignment system and method

TSENG KUO-SHU7 citations75