Inventor

TSAO CHIA-CHI

TW3 patents

⚠️ This page may combine multiple inventors who share the name “TSAO CHIA-CHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TSENG KUO-SHU

1 patent

US8215890B2Jul 10, 2012

Semiconductor wafer robot alignment system and method

TSENG KUO-SHU7 citations75

TSAO CHIA-CHI

1 patent

US8633439B2Jan 21, 2014

System and method for electromagnetic interference shielding for critical dimension-scanning electron microscope

TSAO CHIA-CHI2 citations50

TAIWAN SEMICONDUCTOR MFG

1 patent

US8952330B2Feb 10, 2015

System and method for electromagnetic interference shielding for critical dimension-scanning electron microscope

TAIWAN SEMICONDUCTOR MFG0 citations45