Inventor
CUPERUS MINNE
NL15 patents
⚠️ This page may combine multiple inventors who share the name “CUPERUS MINNE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS7671963B2Mar 2, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV35 citations94
US7352440B2Apr 1, 2008
Substrate placement in immersion lithography
ASML NETHERLANDS BV37 citations93
US7486381B2Feb 3, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations92
US9182222B2Nov 10, 2015
Substrate placement in immersion lithography
ASML NETHERLANDS BV3 citations72
US7330238B2Feb 12, 2008
Lithographic apparatus, immersion projection apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations71
US9740106B2Aug 22, 2017
Substrate placement in immersion lithography
ASML NETHERLANDS BV1 citations61
US8009270B2Aug 30, 2011
Uniform background radiation in maskless lithography
ASML NETHERLANDS BV1 citations51
US10345711B2Jul 9, 2019
Substrate placement in immersion lithography
ASML NETHERLANDS BV0 citations50
US7859644B2Dec 28, 2010
Lithographic apparatus, immersion projection apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50