Inventor
CHANG CHIH-HAN
TW10 patents
⚠️ This page may combine multiple inventors who share the name “CHANG CHIH-HAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NANYA TECHNOLOGY CORP
3 patentsUS6365506B1Apr 2, 2002
Dual-damascene process with porous low-K dielectric material
NANYA TECHNOLOGY CORP60 citations95
US6537872B1Mar 25, 2003
Method of fabricating a DRAM cell capacitor
NANYA TECHNOLOGY CORP9 citations71
US7232718B2Jun 19, 2007
Method for forming a deep trench capacitor buried plate
NANYA TECHNOLOGY CORP4 citations59