Inventor
SEKI JUNICHI
JP74 patents
⚠️ This page may combine multiple inventors who share the name “SEKI JUNICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
32 patentsUS7862761B2Jan 4, 2011
Pattern forming method and pattern forming apparatus
CANON KK273 citations99
US6737790B2May 18, 2004
Image forming apparatus having a heat insulating member
CANON KK56 citations96
US6628392B2Sep 30, 2003
Light modulation apparatus and optical switch, movement detecting device and distance measuring device, alignment device and semiconductor aligner, and processes thereof
CANON KK54 citations96
US6459088B1Oct 1, 2002
Drive stage and scanning probe microscope and information recording/reproducing apparatus using the same
CANON KK78 citations96
US6195313B1Feb 27, 2001
Tracking mechanism and method using probes for information recording/reproducing apparatus
CANON KK56 citations96
US7794222B2Sep 14, 2010
Mold, pattern forming method, and pattern forming apparatus
CANON KK28 citations93
US7510388B2Mar 31, 2009
Mold, imprint method, and process for producing chip
CANON KK16 citations93
US9579843B2Feb 28, 2017
Imprint apparatus in which alignment control of a mold and a substrate is effected
CANON KK6 citations84
US8011916B2Sep 6, 2011
Mold, imprint apparatus, and process for producing structure
CANON KK19 citations84
US7960090B2Jun 14, 2011
Pattern forming method, pattern formed thereby, mold, processing apparatus, and processing method
CANON KK13 citations84
US7927089B2Apr 19, 2011
Mold, apparatus including mold, pattern transfer apparatus, and pattern forming method
CANON KK19 citations84
US7884935B2Feb 8, 2011
Pattern transfer apparatus, imprint apparatus, and pattern transfer method
CANON KK12 citations84
US7828984B2Nov 9, 2010
Imprint method, imprint apparatus, and process for producing chip
CANON KK9 citations84
US7531821B2May 12, 2009
Imprint apparatus and imprint method including dual movable image pick-up device
CANON KK8 citations84
US7347683B2Mar 25, 2008
Mold and molding apparatus using the same
CANON KK12 citations84
US8361336B2Jan 29, 2013
Imprint method for imprinting a pattern of a mold onto a resin material of a substrate and related substrate processing method
CANON KK8 citations83
US7690047B2Mar 30, 2010
Scanning probe apparatus
CANON KK16 citations83
US7631547B2Dec 15, 2009
Scanning probe apparatus and drive stage therefor
CANON KK12 citations83
US7981304B2Jul 19, 2011
Process for producing a chip using a mold
CANON KK6 citations74
US7442028B2Oct 28, 2008
Molding apparatus and molding method
CANON KK6 citations74
US10990005B2Apr 27, 2021
Method in which alignment control of a member and a substrate is effected with respect to an in-plane direction of the substrate and an uncured material in a state of bringing a member and the uncured material on a substrate into contact
CANON KK3 citations73
US10670961B2Jun 2, 2020
Imprinting apparatus for producing a member in which a mold contacts a pattern forming layer using alignment control in an in-plane direction of a substrate
CANON KK2 citations73
US10569450B2Feb 25, 2020
Imprint apparatus, mold, imprint method, and method of manufacturing article
CANON KK2 citations73
US7569817B2Aug 4, 2009
Scanning probe apparatus
CANON KK6 citations73
US8047828B2Nov 1, 2011
Imprint apparatus, imprint method, and mold for imprint
CANON KK5 citations63
US7985061B2Jul 26, 2011
Imprint apparatus having attitude control
CANON KK2 citations63
US7815430B2Oct 19, 2010
Mold, production process of mold, imprint apparatus, and imprint method
CANON KK2 citations63
US7708927B2May 4, 2010
Imprint method and imprint apparatus
CANON KK2 citations63
US7635260B2Dec 22, 2009
Processing apparatus, processing method, and process for producing chip
CANON KK3 citations63
US7422981B2Sep 9, 2008
Method for manufacturing semiconductor device by using dual damascene process and method for manufacturing article having communicating hole
CANON KK2 citations63
US7068904B2Jun 27, 2006
Optical element with periodic structure
CANON KK5 citations63
US7765606B2Jul 27, 2010
Scanning probe apparatus
CANON KK4 citations62
SUEHIRA NOBUHITO
4 patentsUS9046793B2Jun 2, 2015
Light transmissive mold and apparatus for imprinting a pattern onto a material applied on a semiconductor workpiece and related methods
SUEHIRA NOBUHITO7 citations84
US8845317B2Sep 30, 2014
Alignment method, imprint method, alignment apparatus, and position measurement method
SUEHIRA NOBUHITO15 citations84
US8770958B2Jul 8, 2014
Pattern forming method and pattern forming apparatus in which a substrate and a mold are aligned in an in-plane direction
SUEHIRA NOBUHITO3 citations63
US8202075B2Jun 19, 2012
Imprint apparatus and imprint method
SUEHIRA NOBUHITO2 citations63
HITACHI LTD
3 patentsKAWAKAMI EIGO
2 patentsTERASAKI ATSUNORI
2 patentsOKUSHIMA SHINGO
2 patentsNIPPON TELEGRAPH & TELEPHONE
1 patentYOROZU JIDOSHA KOGYO KK
1 patentTOYO RUBBER CHEMICAL IND CO
1 patentOKINAKA MOTOKI
1 patentTDK CORP
1 patentShowing the top 50 of 74 patents by PatentIndex Score.