Inventor

TERASAKI ATSUNORI

JP43 patents

⚠️ This page may combine multiple inventors who share the name “TERASAKI ATSUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TERASAKI ATSUNORI

CANON KK

Mold, pattern forming method, and pattern forming apparatus

Mold, imprint method, and process for producing chip

Pattern forming method, pattern formed thereby, mold, processing apparatus, and processing method

Liquid ejection head

Imprint method for imprinting a pattern of a mold onto a resin material of a substrate and related substrate processing method

Process for producing a chip using a mold

Method for manufacturing laminate and method for manufacturing liquid discharge head

Liquid ejection head, method for manufacturing the same, and printing method

Processing method of substrate and manufacturing method of liquid ejection head

Mold, production process of mold, imprint apparatus, and imprint method

Method for manufacturing semiconductor device by using dual damascene process and method for manufacturing article having communicating hole

Method for producing a silicon substrate and method for producing a liquid ejection head

Substrate joined body

Method of forming film on substrate and method of manufacturing liquid ejection head

Liquid ejection head and method of manufacturing same

Liquid delivery device

Method for manufacturing liquid discharge head and liquid discharge head

Method of manufacturing substrate, method of manufacturing substrate stack and method of manufacturing liquid ejection head

Method for processing silicon substrate and method for manufacturing liquid ejection head

Liquid discharge head, manufacturing method therefor, and recording method

Processing method of silicon substrate, fabricating method of substrate for liquid ejection head, and fabricating method of liquid ejection head

Production process of structure

Method for manufacturing semiconductor device by using dual damascene process and method for manufacturing article having communicating hole

Bonded substrate body, method for manufacturing bonded substrate body, liquid discharge head, and method for manufacturing liquid discharge head

Method for manufacturing structure

Method for removing target object

Method of manufacturing inkjet head substrate

Liquid discharge head, recording apparatus, and method of manufacturing liquid discharge head

TERASAKI ATSUNORI

Structure manufacturing method and liquid discharge head substrate manufacturing method

Mold, mold production process, processing apparatus, and processing method

Manufacturing method of structure by imprint

Mold, imprint method, and process for producing a chip

Process for producing a chip using a mold

Process for producing a device using a mold

SUEHIRA NOBUHITO

Light transmissive mold and apparatus for imprinting a pattern onto a material applied on a semiconductor workpiece and related methods

Pattern forming method and pattern forming apparatus in which a substrate and a mold are aligned in an in-plane direction

KAWAKAMI EIGO

Imprinting apparatus and method therefor

Imprint apparatus and method of manufacturing article

HITACHI HIGH TECH CORP

Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus using deflector

OKUSHIMA SHINGO

Imprint method, chip production process, and imprint apparatus

SETOMOTO YUTAKA

Process of producing grating for X-ray image pickup apparatus

OKINAKA MOTOKI

Nanoimprinting method and mold for use in nanoimprinting

HIRAMOTO ATSUSHI

Processing method of silicon substrate and liquid ejection head manufacturing method