Inventor
WHITENER GLENN
US12 patents
⚠️ This page may combine multiple inventors who share the name “WHITENER GLENN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CABOT MICROELECTRONICS CORP
10 patentsUS9303188B2Apr 5, 2016
Composition for tungsten CMP
CABOT MICROELECTRONICS CORP14 citations84
US9238754B2Jan 19, 2016
Composition for tungsten CMP
CABOT MICROELECTRONICS CORP9 citations84
US9238753B2Jan 19, 2016
CMP compositions selective for oxide and nitride with high removal rate and low defectivity
CABOT MICROELECTRONICS CORP12 citations82
US9303189B2Apr 5, 2016
Composition for tungsten CMP
CABOT MICROELECTRONICS CORP4 citations73
US9303190B2Apr 5, 2016
Mixed abrasive tungsten CMP composition
CABOT MICROELECTRONICS CORP5 citations72
US10418248B2Sep 17, 2019
Method of polishing group III-V materials
CABOT MICROELECTRONICS CORP4 citations71
US10066126B2Sep 4, 2018
Tungsten processing slurry with catalyst
CABOT MICROELECTRONICS CORP5 citations67
US9566686B2Feb 14, 2017
Composition for tungsten CMP
CABOT MICROELECTRONICS CORP1 citations52
US10294399B2May 21, 2019
Composition and method for polishing silicon carbide
CABOT MICROELECTRONICS CORP0 citations48
US9944828B2Apr 17, 2018
Slurry for chemical mechanical polishing of cobalt
CABOT MICROELECTRONICS CORP0 citations46