Inventor

MCMILLIN BRIAN

US24 patents

⚠️ This page may combine multiple inventors who share the name “MCMILLIN BRIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MCMILLIN BRIAN

LAM RES CORP

Method and apparatus for improving etch and deposition uniformity in plasma semiconductor processing

Gas injection system for plasma processing

Wet cleaning of electrostatic chucks

Method for high density plasma chemical vapor deposition of dielectric films

Inductively coupled plasma CVD

Plasma excitation coil

Multiple zone gas distribution apparatus for thermal control of semiconductor wafer

Plasma excitation coil

Method of depositing a silicon containing layer on a semiconductor substrate

Method for reduction of voltage potential spike during dechucking

Hybrid edge ring for plasma wafer processing

Method of wet cleaning aluminum chamber parts

Method for using an RC circuit to model trapped charge in an electrostatic chuck

MONITECH INC

Vehicle ignition interlock systems having transdermal alcohol sensor

Vehicle ignition interlock systems that detect the presence of alcohol within vehicles

Vehicle ignition interlock systems with retesting frequency control

Vehicle ignition interlock systems with mouth alcohol contamination sensor

Vehicle ignition interlock systems with multiple alcohol sensors

Sample head for breath analyzer ignition interlock device

Control module for breath analyzer ignition interlock device

KNOBLE DAVID W

LED downlight

LAM RESEARCH

Variable high temperature chuck for high density plasma chemical vapor deposition

MCMILLIN BRIAN

Method and apparatus for reduction of voltage potential spike during dechucking

ABATCHEV MIRZAFER

Pressure control valve assembly of plasma processing chamber and rapid alternating process