Inventor
VIJAYAKUMAR ARUN
GB10 patents
⚠️ This page may combine multiple inventors who share the name “VIJAYAKUMAR ARUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
5 patentsUS9224675B1Dec 29, 2015
Automatic capacitance tuning for robust middle of the line contact and silicide applications
IBM18 citations83
US10170359B2Jan 1, 2019
Diffusion barrier layer formation
IBM1 citations72
US9847251B2Dec 19, 2017
Diffusion barrier layer formation
IBM1 citations61
US10319633B2Jun 11, 2019
Diffusion barrier layer formation
IBM0 citations51
US9406554B2Aug 2, 2016
Diffusion barrier layer formation
IBM0 citations51