Inventor
BISCHOFF THOMAS
DE19 patents
⚠️ This page may combine multiple inventors who share the name “BISCHOFF THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
7 patentsUS9280060B2Mar 8, 2016
Illumination system for microlithography
ZEISS CARL SMT GMBH5 citations82
US8009343B2Aug 30, 2011
Optical imaging device having at least one system diaphragm
ZEISS CARL SMT GMBH6 citations68
US9606441B2Mar 28, 2017
Illumination system for microlithography
ZEISS CARL SMT GMBH1 citations61
US10139733B2Nov 27, 2018
Diaphragm changing device
ZEISS CARL SMT GMBH0 citations51
US9645388B2May 9, 2017
Facet mirror device
ZEISS CARL SMT GMBH0 citations51
US10088754B2Oct 2, 2018
Illumination system for microlithography
ZEISS CARL SMT GMBH0 citations50
US10078270B2Sep 18, 2018
Support for a component of an optical device
ZEISS CARL SMT GMBH1 citations47