Inventor
OKAZAWA MITSUHIRO
JP5 patents
Patents
5 patentsUS11908659B2Feb 20, 2024
Multi charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations60
US11205557B2Dec 21, 2021
Multi charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations54
US11217428B2Jan 4, 2022
Multi charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations48
US11574797B2Feb 7, 2023
Multiple-charged particle-beam irradiation apparatus and multiple-charged particle-beam irradiation method
NUFLARE TECHNOLOGY INC0 citations44
US10236158B2Mar 19, 2019
Heat transfer plate and writing apparatus
NUFLARE TECHNOLOGY INC0 citations38