Inventor
SHIRATORI TSUBASA
JP13 patents
⚠️ This page may combine multiple inventors who share the name “SHIRATORI TSUBASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
6 patentsUS10134582B2Nov 20, 2018
Tantalum compound and methods of forming thin film and fabricating integrated circuit device by using the same
SAMSUNG ELECTRONICS CO LTD3 citations72
US10913754B2Feb 9, 2021
Lanthanum compound and methods of forming thin film and integrated circuit device using the lanthanum compound
SAMSUNG ELECTRONICS CO LTD2 citations71
US11967502B2Apr 23, 2024
Methods of forming material layer, semiconductor devices, and methods of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations61
US10900119B2Jan 26, 2021
Tungsten precursor and method of forming Tungsten containing layer using the same
SAMSUNG ELECTRONICS CO LTD0 citations57
US10651031B2May 12, 2020
Tantalum compound
SAMSUNG ELECTRONICS CO LTD0 citations51
US9960032B2May 1, 2018
Methods of forming thin films and methods of fabricating integrated circuit devices using the same
SAMSUNG ELECTRONICS CO LTD0 citations50
ADEKA CORP
6 patentsUS10927460B2Feb 23, 2021
Raw material for forming thin film, and method for manufacturing thin film
ADEKA CORP0 citations62
US11807652B2Nov 7, 2023
Tungsten compound, raw material for thin film formation and method for producing thin film
ADEKA CORP0 citations60
US10155784B2Dec 18, 2018
Alcohol compound
ADEKA CORP0 citations51
US9896468B2Feb 20, 2018
Metal alkoxide compound, thin-film-forming material, method for producing thin film, and alcohol compound
ADEKA CORP1 citations51
US10364495B2Jul 30, 2019
Method for producing a thin film
ADEKA CORP0 citations50
US9663538B2May 30, 2017
Aluminum compound, thin-film forming raw material, and method for producing thin film
ADEKA CORP1 citations50