Inventor
MURAKI YUSUKE
US14 patents
⚠️ This page may combine multiple inventors who share the name “MURAKI YUSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS6551896B2Apr 22, 2003
Capacitor for analog circuit, and manufacturing method thereof
TOKYO ELECTRON LTD16 citations83
US6355582B1Mar 12, 2002
Silicon nitride film formation method
TOKYO ELECTRON LTD14 citations81
US8353986B2Jan 15, 2013
Substrate processing apparatus
TOKYO ELECTRON LTD15 citations79
US10923356B2Feb 16, 2021
Gas phase etch with controllable etch selectivity of silicon-germanium alloys
TOKYO ELECTRON LTD2 citations73
US6797560B2Sep 28, 2004
Method of manufacturing a capacitor having tantalum oxide film as an insulating film
TOKYO ELECTRON LTD9 citations72
US11328932B2May 10, 2022
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US11715643B2Aug 1, 2023
Gas phase etch with controllable etch selectivity of metals
TOKYO ELECTRON LTD0 citations60
US9362149B2Jun 7, 2016
Etching method, etching apparatus, and storage medium
TOKYO ELECTRON LTD0 citations52
US9911596B2Mar 6, 2018
Modification processing method and method of manufacturing semiconductor device
TOKYO ELECTRON LTD0 citations51
US9443724B2Sep 13, 2016
Modification processing method and method of manufacturing semiconductor device
TOKYO ELECTRON LTD0 citations51
US7897498B2Mar 1, 2011
Method for manufacturing semiconductor device
TOKYO ELECTRON LTD0 citations51