Inventor

CHEN CHIH-LIEH

TW3 patents

Patents

3 patents

US11423526B2Aug 23, 2022

Optical inspection of a wafer

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71

US12400313B2Aug 26, 2025

Optical inspection of a wafer

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60

US11954841B2Apr 9, 2024

Optical inspection of a wafer

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60