Inventor
CHENG CHIH HSUAN
TW13 patents
Patents
13 patentsUS10170555B1Jan 1, 2019
Intermetallic doping film with diffusion in source/drain
TAIWAN SEMICONDUCTOR MFG CO LTD19 citations94
US10510875B2Dec 17, 2019
Source and drain structure with reduced contact resistance and enhanced mobility
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US11545562B2Jan 3, 2023
Source and drain structure with reduced contact resistance and enhanced mobility
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11171003B2Nov 9, 2021
Doping through diffusion and epitaxy profile shaping
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10910223B2Feb 2, 2021
Doping through diffusion and epitaxy profile shaping
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11600713B2Mar 7, 2023
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12408347B2Sep 2, 2025
Method for forming a 3-D semiconductor memory structure comprising horizontal and vertical conductive lines
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12300741B2May 13, 2025
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12125707B2Oct 22, 2024
Fin field-effect transistor device and method of forming
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12015085B2Jun 18, 2024
Method of manufacturing a semiconductor device including etching polysilicon
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11532481B2Dec 20, 2022
Fin field-effect transistor device and method of forming
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11430893B2Aug 30, 2022
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US12432955B2Sep 30, 2025
Source and drain structure with reduced contact resistance and enhanced mobility
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52