Inventor
RAMALINGAM JOTHILINGAM
US21 patents
Patents
21 patentsUS11915918B2Feb 27, 2024
Cleaning of sin with CCP plasma or RPS clean
APPLIED MATERIALS INC4 citations74
US10043670B2Aug 7, 2018
Systems and methods for low resistivity physical vapor deposition of a tungsten film
APPLIED MATERIALS INC4 citations72
US11842890B2Dec 12, 2023
Methods and apparatus for physical vapor deposition (PVD) dielectric deposition
APPLIED MATERIALS INC2 citations71
US11572618B2Feb 7, 2023
Method and chamber for backside physical vapor deposition
APPLIED MATERIALS INC2 citations71
US10388532B2Aug 20, 2019
Methods and devices using PVD ruthenium
APPLIED MATERIALS INC2 citations71
US11550222B2Jan 10, 2023
Dose reduction of patterned metal oxide photoresists
APPLIED MATERIALS INC3 citations70
US11469096B2Oct 11, 2022
Method and chamber for backside physical vapor deposition
APPLIED MATERIALS INC2 citations70
US11495461B2Nov 8, 2022
Film stack for lithography applications
APPLIED MATERIALS INC2 citations68
US12027354B2Jul 2, 2024
Cleaning of SIN with CCP plasma or RPS clean
APPLIED MATERIALS INC0 citations62
US11661651B2May 30, 2023
Methods and apparatus for passivating a target
APPLIED MATERIALS INC0 citations62
US11512387B2Nov 29, 2022
Methods and apparatus for passivating a target
APPLIED MATERIALS INC0 citations62
US11270898B2Mar 8, 2022
Apparatus for enhancing flow uniformity in a process chamber
APPLIED MATERIALS INC0 citations62
US10734235B2Aug 4, 2020
Systems and methods for low resistivity physical vapor deposition of a tungsten film
APPLIED MATERIALS INC1 citations62
US12368033B2Jul 22, 2025
Methods and apparatus for physical vapor deposition (PVD) dielectric deposition
APPLIED MATERIALS INC0 citations61
US11655534B2May 23, 2023
Apparatus for reducing tungsten resistivity
APPLIED MATERIALS INC0 citations61
US11447857B2Sep 20, 2022
Methods and apparatus for reducing tungsten resistivity
APPLIED MATERIALS INC0 citations61
US11994800B2May 28, 2024
Dose reduction of patterned metal oxide photoresists
APPLIED MATERIALS INC0 citations60
US12176205B2Dec 24, 2024
Method and chamber for backside physical vapor deposition
APPLIED MATERIALS INC0 citations59
US12142478B2Nov 12, 2024
Method and chamber for backside physical vapor deposition
APPLIED MATERIALS INC0 citations59
US11450514B1Sep 20, 2022
Methods of reducing particles in a physical vapor deposition (PVD) chamber
APPLIED MATERIALS INC0 citations59
US9461137B1Oct 4, 2016
Tungsten silicide nitride films and methods of formation
APPLIED MATERIALS INC0 citations51