Inventor
SHIBA EIICHIRO
JP12 patents
Patents
12 patentsUS10529554B2Jan 7, 2020
Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches
ASM IP HOLDING BV377 citations97
US9711345B2Jul 18, 2017
Method for forming aluminum nitride-based film by PEALD
ASM IP HOLDING BV465 citations97
US9447498B2Sep 20, 2016
Method for performing uniform processing in gas system-sharing multiple reaction chambers
ASM IP HOLDING BV498 citations97
US11821078B2Nov 21, 2023
Method for forming precoat film and method for forming silicon-containing film
ASM IP HOLDING BV4 citations70
US12266540B2Apr 1, 2025
Method for fabricating layer structure having target topological profile
ASM IP HOLDING BV0 citations61
US12100597B2Sep 24, 2024
Method and system for forming patterned structures including silicon nitride
ASM IP HOLDING BV0 citations61
US11961741B2Apr 16, 2024
Method for fabricating layer structure having target topological profile
ASM IP HOLDING BV1 citations61
US11676812B2Jun 13, 2023
Method for forming silicon nitride film selectively on top/bottom portions
ASM IP HOLDING BV1 citations60
US10720322B2Jul 21, 2020
Method for forming silicon nitride film selectively on top surface
ASM IP HOLDING BV1 citations60
US11827981B2Nov 28, 2023
Method of depositing material on stepped structure
ASM IP HOLDING BV1 citations57
US12431354B2Sep 30, 2025
Silicon nitride and silicon oxide deposition methods using fluorine inhibitor
ASM IP HOLDING BV0 citations50
US12098460B2Sep 24, 2024
Systems and methods for stabilizing reaction chamber pressure
ASM IP HOLDING BV0 citations50