Inventor
KOBAYASHI AKIKO
JP26 patents
⚠️ This page may combine multiple inventors who share the name “KOBAYASHI AKIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
9 patentsUS10283353B2May 7, 2019
Method of reforming insulating film deposited on substrate with recess pattern
ASM IP HOLDING BV416 citations99
US9793135B1Oct 17, 2017
Method of cyclic dry etching using etchant film
ASM IP HOLDING BV475 citations99
US9478414B2Oct 25, 2016
Method for hydrophobization of surface of silicon-containing film by ALD
ASM IP HOLDING BV465 citations99
US8785215B2Jul 22, 2014
Method for repairing damage of dielectric film by cyclic processes
ASM IP HOLDING BV521 citations99
US10504742B2Dec 10, 2019
Method of atomic layer etching using hydrogen plasma
ASM IP HOLDING BV9 citations84
US12266540B2Apr 1, 2025
Method for fabricating layer structure having target topological profile
ASM IP HOLDING BV0 citations61
US11961741B2Apr 16, 2024
Method for fabricating layer structure having target topological profile
ASM IP HOLDING BV1 citations61
US10910262B2Feb 2, 2021
Method of selectively depositing a capping layer structure on a semiconductor device structure
ASM IP HOLDING BV1 citations60
US12347675B2Jul 1, 2025
Methods and systems for topography-selective depositions
ASM IP HOLDING BV0 citations51
ANELVA CORP
4 patentsUS6143077ANov 7, 2000
Chemical vapor deposition apparatus
ANELVA CORP125 citations97
US5993679ANov 30, 1999
Method of cleaning metallic films built up within thin film deposition apparatus
ANELVA CORP48 citations89
US6562219B2May 13, 2003
Method for the formation of copper wiring films
ANELVA CORP7 citations72
US6726954B2Apr 27, 2004
Method and system for forming copper thin film
ANELVA CORP6 citations63
KOBAYASHI AKIKO
3 patentsUS8647722B2Feb 11, 2014
Method of forming insulation film using plasma treatment cycles
KOBAYASHI AKIKO541 citations98
US10378106B2Aug 13, 2019
Method of forming insulation film by modified PEALD
KOBAYASHI AKIKO4 citations72
US8714800B2May 6, 2014
Light-source device and simulated-solar-light irradiation device provided with same
KOBAYASHI AKIKO4 citations69