Inventor

EGGUM SHAWN D

US25 patents

⚠️ This page may combine multiple inventors who share the name “EGGUM SHAWN D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EGGUM SHAWN D

ENTEGRIS INC

Composite substrate carrier

Wafer carrier door and spring biased latching mechanism

Connector assembly for fluid transfer

Wafer carrier door and spring biased latching mechanism

Wafer enclosure sealing arrangement for wafer containers

Wafer support attachment for a semi-conductor wafer transport container

Composite substrate carrier

Wafer carrier with wafer retaining system

Wafer support attachment for a semi-conductor wafer transport container

Wafer carrier door and latching mechanism with c-shaped cam follower

Wafer carrier door with form fitting mechanism cover

Wafer carrier door and latching mechanism withhourglass shaped key slot

Purge connectors and modules for a substrate container

Composite substrate carrier

Process for fabricating composite substrate carrier

Methods of installing a purge fluid conditioning element into a semiconductor substrate carrying container

Composite substrate carrier

Reticle pod with window

Reticle pod having side containment of reticle

Reticle pod having side containment of reticle

Container for holding and transporting reticles having a transparent window assembly

FLUOROWARE INC

Composite transport carrier

Hinged tilt box with inclined portion

Latch for wafer storage box for manual or robot operation

Disk carrier with transponder