Inventor

SMITH MARK V

US32 patents

⚠️ This page may combine multiple inventors who share the name “SMITH MARK V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SMITH MARK V

ENTEGRIS INC

Wafer container with door actuated wafer restraint

Front opening substrate container with bottom plate

Wafer container and door with vibration dampening latching mechanism

Wafer container with secondary wafer restraint system

Substrate carrier

Front opening substrate container with bottom plate

Wafer container and door with vibration dampening latching mechanism

Wafer container with door actuated wafer restraint

Photochromic substrate container

Substrate container with purge ports

Substrate shipper component

CMP retaining ring

Kinematic coupling with textured contact surfaces

Wafer container and door with cam latching mechanism

Substrate container

Towers for substrate carriers

Wafer carrier with apertured door for cleaning

Purge connectors and modules for a substrate container

Wafer container with tubular environmental control components

Membrane diffuser for a substrate container

Membrane diffuser for a substrate container

Methods of installing a purge fluid conditioning element into a semiconductor substrate carrying container

Substrate container valve assemblies

Wafer carrier door

Handle for wafer carrier

BURNS JOHN

Porous barrier for evenly distributed purge gas in a microenvironment

Substrate shipper component

ASYST TECHNOLOGIES

SMIF container including an electrostatic dissipative reticle support structure

SMIF container latch mechanism

SEMIFAB INC

Filter cartridge assembly for a gas purging system

WATSON JAMES A

Wafer container with tubular environmental control components

SMITH MARK V

Dice construction