P

Inventor

BIZEN DAISUKE

JP20 patents
⚠️ This page may combine multiple inventors who share the name “BIZEN DAISUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

16 patents
US11011348B2May 18, 2021

Scanning electron microscope and sample observation method using scanning electron microscope

HITACHI HIGH TECH CORP8 citations83
US9336984B2May 10, 2016

Charged particle beam device and measuring method using the same

HITACHI HIGH TECH CORP6 citations73
US9520266B2Dec 13, 2016

Pattern critical dimension measurement equipment and method for measuring pattern critical dimension

HITACHI HIGH TECH CORP4 citations72
US11211224B2Dec 28, 2021

Charged particle beam apparatus

HITACHI HIGH TECH CORP0 citations62
US11211226B2Dec 28, 2021

Pattern cross-sectional shape estimation system and program

HITACHI HIGH TECH CORP1 citations62
US11610756B2Mar 21, 2023

Charged particle beam apparatus and control method

HITACHI HIGH TECH CORP0 citations60
US12406826B2Sep 2, 2025

Charged particle beam device and sample observation method

HITACHI HIGH TECH CORP0 citations51
US11869745B2Jan 9, 2024

Charged particle beam device

HITACHI HIGH TECH CORP0 citations51
US11164720B2Nov 2, 2021

Scanning electron microscope and calculation method for three-dimensional structure depth

HITACHI HIGH TECH CORP0 citations51
US12505976B2Dec 23, 2025

Charged particle beam apparatus and method for calculating roughness index

HITACHI HIGH TECH CORP0 citations50
US11456150B2Sep 27, 2022

Charged particle beam device

HITACHI HIGH TECH CORP0 citations50
US11282671B2Mar 22, 2022

Charged-particle beam apparatus

HITACHI HIGH TECH CORP0 citations50
US12181513B2Dec 31, 2024

Inspection method

HITACHI HIGH TECH CORP0 citations48
US12191111B2Jan 7, 2025

Charged particle beam system and method for determining observation conditions in charged particle beam device

HITACHI HIGH TECH CORP0 citations45
US10217604B2Feb 26, 2019

Charged particle beam apparatus

HITACHI HIGH TECH CORP0 citations41
US10014160B2Jul 3, 2018

Scanning electron microscope and method for controlling same

HITACHI HIGH TECH CORP0 citations40

HITACHI LTD

4 patents