Inventor
BIZEN DAISUKE
JP20 patents
⚠️ This page may combine multiple inventors who share the name “BIZEN DAISUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
16 patentsUS11011348B2May 18, 2021
Scanning electron microscope and sample observation method using scanning electron microscope
HITACHI HIGH TECH CORP8 citations83
US9336984B2May 10, 2016
Charged particle beam device and measuring method using the same
HITACHI HIGH TECH CORP6 citations73
US9520266B2Dec 13, 2016
Pattern critical dimension measurement equipment and method for measuring pattern critical dimension
HITACHI HIGH TECH CORP4 citations72
US11211224B2Dec 28, 2021
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations62
US11211226B2Dec 28, 2021
Pattern cross-sectional shape estimation system and program
HITACHI HIGH TECH CORP1 citations62
US11610756B2Mar 21, 2023
Charged particle beam apparatus and control method
HITACHI HIGH TECH CORP0 citations60
US12406826B2Sep 2, 2025
Charged particle beam device and sample observation method
HITACHI HIGH TECH CORP0 citations51
US11869745B2Jan 9, 2024
Charged particle beam device
HITACHI HIGH TECH CORP0 citations51
US11164720B2Nov 2, 2021
Scanning electron microscope and calculation method for three-dimensional structure depth
HITACHI HIGH TECH CORP0 citations51
US12505976B2Dec 23, 2025
Charged particle beam apparatus and method for calculating roughness index
HITACHI HIGH TECH CORP0 citations50
US11456150B2Sep 27, 2022
Charged particle beam device
HITACHI HIGH TECH CORP0 citations50
US11282671B2Mar 22, 2022
Charged-particle beam apparatus
HITACHI HIGH TECH CORP0 citations50
US12181513B2Dec 31, 2024
Inspection method
HITACHI HIGH TECH CORP0 citations48
US12191111B2Jan 7, 2025
Charged particle beam system and method for determining observation conditions in charged particle beam device
HITACHI HIGH TECH CORP0 citations45
US10217604B2Feb 26, 2019
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations41
US10014160B2Jul 3, 2018
Scanning electron microscope and method for controlling same
HITACHI HIGH TECH CORP0 citations40
HITACHI LTD
4 patentsUS9966225B2May 8, 2018
Charged particle beam device, simulation method, and simulation device
HITACHI LTD5 citations73
US10338367B2Jul 2, 2019
Scanning microscope with controlled variable measurement parameters
HITACHI LTD0 citations50
US10825649B2Nov 3, 2020
Electron beam device
HITACHI LTD0 citations41
US10262830B2Apr 16, 2019
Scanning electron microscope and electron trajectory adjustment method therefor
HITACHI LTD0 citations41