Inventor
KAKUTA JUNICHI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “KAKUTA JUNICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
4 patentsUS7960696B2Jun 14, 2011
Method for inspecting and measuring sample and scanning electron microscope
HITACHI HIGH TECH CORP4 citations61
US12505976B2Dec 23, 2025
Charged particle beam apparatus and method for calculating roughness index
HITACHI HIGH TECH CORP0 citations50
US12347074B2Jul 1, 2025
Pattern measurement system, pattern measurement method, and program for measuring edge roughness at the edge of a pattern based on a random noise component
HITACHI HIGH TECH CORP0 citations46
US10665424B2May 26, 2020
Pattern measuring method and pattern measuring apparatus
HITACHI HIGH TECH CORP0 citations40