P

Inventor

CHEN XUN

CN71 patents
⚠️ This page may combine multiple inventors who share the name “CHEN XUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BRION TECH INC

19 patents
US7120895B2Oct 10, 2006

System and method for lithography simulation

BRION TECH INC73 citations99
US7111277B2Sep 19, 2006

System and method for lithography simulation

BRION TECH INC65 citations99
US7003758B2Feb 21, 2006

System and method for lithography simulation

BRION TECH INC281 citations99
US6969837B2Nov 29, 2005

System and method for lithography process monitoring and control

BRION TECH INC82 citations99
US6884984B2Apr 26, 2005

System and method for lithography process monitoring and control

BRION TECH INC101 citations99
US6828542B2Dec 7, 2004

System and method for lithography process monitoring and control

BRION TECH INC120 citations99
US6820028B2Nov 16, 2004

Method and apparatus for monitoring integrated circuit fabrication

BRION TECH INC81 citations99
US6807503B2Oct 19, 2004

Method and apparatus for monitoring integrated circuit fabrication

BRION TECH INC126 citations99
US6806456B1Oct 19, 2004

System and method for lithography process monitoring and control

BRION TECH INC86 citations99
US6803554B2Oct 12, 2004

System and method for lithography process monitoring and control

BRION TECH INC107 citations99
US7114145B2Sep 26, 2006

System and method for lithography simulation

BRION TECH INC63 citations98
US7053355B2May 30, 2006

System and method for lithography process monitoring and control

BRION TECH INC93 citations98
US6969864B2Nov 29, 2005

System and method for lithography process monitoring and control

BRION TECH INC71 citations98
US6959255B2Oct 25, 2005

Method and apparatus for monitoring integrated circuit fabrication

BRION TECH INC67 citations98
US7695876B2Apr 13, 2010

Method for identifying and using process window signature patterns for lithography process control

BRION TECH INC61 citations97
US7117478B2Oct 3, 2006

System and method for lithography simulation

BRION TECH INC61 citations96
US6892156B2May 10, 2005

Method and apparatus for monitoring integrated circuit fabrication

BRION TECH INC53 citations96
US6879924B2Apr 12, 2005

Method and apparatus for monitoring integrated circuit fabrication

BRION TECH INC62 citations96
US7233874B2Jun 19, 2007

Method and apparatus for monitoring integrated circuit fabrication

BRION TECH INC23 citations93

SAMSUNG ELECTRONICS CO LTD

10 patents

YE JUN

4 patents

UNIV GUANGDONG TECHNOLOGY

3 patents

ASML NETHERLANDS BV

2 patents

HYTTO PTE LTD

2 patents

UNIV CLEMSON

2 patents

BRION TECNOLOGIES INC

1 patent

UNIV LELAND STANFORD JUNIOR

1 patent

CHEN XUN

1 patent

WANGSU SCIENCE & TECH CO LTD

1 patent

SAP SE

1 patent

FUJITSU LTD

1 patent

NOKIA TECHNOLOGIES OY

1 patent

ZTE CORP

1 patent

Showing the top 50 of 71 patents by PatentIndex Score.