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Inventor

MCCOY JOHN H

11 patents
⚠️ This page may combine multiple inventors who share the name “MCCOY JOHN H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

4 patents
US6376329B1Apr 23, 2002

Semiconductor wafer alignment using backside illumination

NIKON CORP69 citations96
US5777729AJul 7, 1998

Wafer inspection method and apparatus using diffracted light

NIKON CORP86 citations95
US5741614AApr 21, 1998

Atomic force microscope measurement process for dense photoresist patterns

NIKON CORP26 citations92
US5648854AJul 15, 1997

Alignment system with large area search for wafer edge and global marks

NIKON CORP72 citations91

NIKON PRECISION INC

2 patents
US5437946AAug 1, 1995

Multiple reticle stitching for scanning exposure system

NIKON PRECISION INC87 citations95
US5838450ANov 17, 1998

Direct reticle to wafer alignment using fluorescence for integrated circuit lithography

NIKON PRECISION INC34 citations92

HUGHES AIRCRAFT CO

2 patents
US4019109AApr 19, 1977

Alignment system and method with micromovement stage

HUGHES AIRCRAFT CO83 citations95
US4085329AApr 18, 1978

Hard X-ray and fluorescent X-ray detection of alignment marks for precision mask alignment

HUGHES AIRCRAFT CO30 citations81

NIPPON KOGAKU KK

1 patent
USH2114HFeb 1, 2005

Inspection tool for testing and adjusting a projection unit of a lithography system

NIPPON KOGAKU KK16 citations84

(unassigned)

1 patent
US6316164B1Nov 13, 2001

Proximity effect correction method through uniform removal of fraction of interior pixels

7 citations73

NIKON RESEARCH CORP OF AMERICA

1 patent
US5936254AAug 10, 1999

Thin film detection method and apparatus

NIKON RESEARCH CORP OF AMERICA7 citations67