P

Inventor

FROSIEN JUERGEN

DE74 patents
⚠️ This page may combine multiple inventors who share the name “FROSIEN JUERGEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INTEGRATED CIRCUIT TESTING

24 patents
US8378299B2Feb 19, 2013

Twin beam charged particle column and method of operating thereof

INTEGRATED CIRCUIT TESTING62 citations98
US4926054AMay 15, 1990

Objective lens for focusing charged particles in an electron microscope

INTEGRATED CIRCUIT TESTING85 citations96
US7544937B2Jun 9, 2009

Charged particle beam device for high spatial resolution and multiple perspective imaging

INTEGRATED CIRCUIT TESTING37 citations93
US7253417B2Aug 7, 2007

Multi-axis compound lens, beam system making use of the compound lens, and method using the compound lens

INTEGRATED CIRCUIT TESTING39 citations93
US5041724AAug 20, 1991

Method of operating an electron beam measuring device

INTEGRATED CIRCUIT TESTING29 citations93
US7335894B2Feb 26, 2008

High current density particle beam system

INTEGRATED CIRCUIT TESTING40 citations91
US7633074B2Dec 15, 2009

Arrangement and method for compensating emitter tip vibrations

INTEGRATED CIRCUIT TESTING15 citations84
US7507956B2Mar 24, 2009

Charged particle beam energy width reduction system for charged particle beam system

INTEGRATED CIRCUIT TESTING9 citations84
US7465939B2Dec 16, 2008

Aberration correction device and method for operating same

INTEGRATED CIRCUIT TESTING10 citations84
US7439500B2Oct 21, 2008

Analyzing system and charged particle beam device

INTEGRATED CIRCUIT TESTING12 citations84
US7326927B2Feb 5, 2008

Focusing lens and charged particle beam device for titled landing angle operation

INTEGRATED CIRCUIT TESTING9 citations84
US7595490B2Sep 29, 2009

Charged particle beam emitting device and method for operating a charged particle beam emitting device

INTEGRATED CIRCUIT TESTING10 citations83
US7638777B2Dec 29, 2009

Imaging system with multi source array

INTEGRATED CIRCUIT TESTING8 citations81
US7675042B2Mar 9, 2010

Beam optical component for charged particle beams

INTEGRATED CIRCUIT TESTING7 citations74
US5061856AOct 29, 1991

Corpuscular beam device

INTEGRATED CIRCUIT TESTING10 citations72
US7968855B2Jun 28, 2011

Dual mode gas field ion source

INTEGRATED CIRCUIT TESTING6 citations63
US7939800B2May 10, 2011

Arrangement and method for compensating emitter tip vibrations

INTEGRATED CIRCUIT TESTING5 citations63
US7919749B2Apr 5, 2011

Energy filter for cold field emission electron beam apparatus

INTEGRATED CIRCUIT TESTING2 citations63
US7851768B2Dec 14, 2010

Ultra high precision measurement tool with control loop

INTEGRATED CIRCUIT TESTING4 citations63
US7847266B2Dec 7, 2010

Device and method for selecting an emission area of an emission pattern

INTEGRATED CIRCUIT TESTING4 citations63
US7829870B2Nov 9, 2010

Method and apparatus for in-situ sample preparation

INTEGRATED CIRCUIT TESTING6 citations63
US7679054B2Mar 16, 2010

Double stage charged particle beam energy width reduction system for charged particle beam system

INTEGRATED CIRCUIT TESTING3 citations63
US7663102B2Feb 16, 2010

High current density particle beam system

INTEGRATED CIRCUIT TESTING5 citations63
US7589328B2Sep 15, 2009

Gas field ION source for multiple applications

INTEGRATED CIRCUIT TESTING6 citations63

SIEMENS AG

11 patents

ADVANTEST CORP

6 patents

ACT ADVANCED CIRCUIT TESTING

5 patents

ALMOGY GILAD

1 patent

EBETECH ELECTRON BEAM TECHNOLO

1 patent

JEOL LTD

1 patent

APPLIED MATERIALS ISRAEL LTD

1 patent

Showing the top 50 of 74 patents by PatentIndex Score.