Inventor
FROSIEN JUERGEN
DE74 patents
⚠️ This page may combine multiple inventors who share the name “FROSIEN JUERGEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEGRATED CIRCUIT TESTING
24 patentsUS8378299B2Feb 19, 2013
Twin beam charged particle column and method of operating thereof
INTEGRATED CIRCUIT TESTING62 citations98
US4926054AMay 15, 1990
Objective lens for focusing charged particles in an electron microscope
INTEGRATED CIRCUIT TESTING85 citations96
US7544937B2Jun 9, 2009
Charged particle beam device for high spatial resolution and multiple perspective imaging
INTEGRATED CIRCUIT TESTING37 citations93
US7253417B2Aug 7, 2007
Multi-axis compound lens, beam system making use of the compound lens, and method using the compound lens
INTEGRATED CIRCUIT TESTING39 citations93
US5041724AAug 20, 1991
Method of operating an electron beam measuring device
INTEGRATED CIRCUIT TESTING29 citations93
US7335894B2Feb 26, 2008
High current density particle beam system
INTEGRATED CIRCUIT TESTING40 citations91
US7633074B2Dec 15, 2009
Arrangement and method for compensating emitter tip vibrations
INTEGRATED CIRCUIT TESTING15 citations84
US7507956B2Mar 24, 2009
Charged particle beam energy width reduction system for charged particle beam system
INTEGRATED CIRCUIT TESTING9 citations84
US7465939B2Dec 16, 2008
Aberration correction device and method for operating same
INTEGRATED CIRCUIT TESTING10 citations84
US7439500B2Oct 21, 2008
Analyzing system and charged particle beam device
INTEGRATED CIRCUIT TESTING12 citations84
US7326927B2Feb 5, 2008
Focusing lens and charged particle beam device for titled landing angle operation
INTEGRATED CIRCUIT TESTING9 citations84
US7595490B2Sep 29, 2009
Charged particle beam emitting device and method for operating a charged particle beam emitting device
INTEGRATED CIRCUIT TESTING10 citations83
US7638777B2Dec 29, 2009
Imaging system with multi source array
INTEGRATED CIRCUIT TESTING8 citations81
US7675042B2Mar 9, 2010
Beam optical component for charged particle beams
INTEGRATED CIRCUIT TESTING7 citations74
US5061856AOct 29, 1991
Corpuscular beam device
INTEGRATED CIRCUIT TESTING10 citations72
US7968855B2Jun 28, 2011
Dual mode gas field ion source
INTEGRATED CIRCUIT TESTING6 citations63
US7939800B2May 10, 2011
Arrangement and method for compensating emitter tip vibrations
INTEGRATED CIRCUIT TESTING5 citations63
US7919749B2Apr 5, 2011
Energy filter for cold field emission electron beam apparatus
INTEGRATED CIRCUIT TESTING2 citations63
US7851768B2Dec 14, 2010
Ultra high precision measurement tool with control loop
INTEGRATED CIRCUIT TESTING4 citations63
US7847266B2Dec 7, 2010
Device and method for selecting an emission area of an emission pattern
INTEGRATED CIRCUIT TESTING4 citations63
US7829870B2Nov 9, 2010
Method and apparatus for in-situ sample preparation
INTEGRATED CIRCUIT TESTING6 citations63
US7679054B2Mar 16, 2010
Double stage charged particle beam energy width reduction system for charged particle beam system
INTEGRATED CIRCUIT TESTING3 citations63
US7663102B2Feb 16, 2010
High current density particle beam system
INTEGRATED CIRCUIT TESTING5 citations63
US7589328B2Sep 15, 2009
Gas field ION source for multiple applications
INTEGRATED CIRCUIT TESTING6 citations63
SIEMENS AG
11 patentsUS4985681AJan 15, 1991
Particle beam measuring method for non-contact testing of interconnect networks
SIEMENS AG55 citations96
US4831266AMay 16, 1989
Detector objective for particle beam apparatus
SIEMENS AG68 citations96
US4812651AMar 14, 1989
Spectrometer objective for particle beam measuring instruments
SIEMENS AG46 citations93
US4785176ANov 15, 1988
Electrostatic-magnetic lens for particle beam apparatus
SIEMENS AG48 citations92
US4713543ADec 15, 1987
Scanning particle microscope
SIEMENS AG47 citations92
US4514638AApr 30, 1985
Electron-optical system with variable-shaped beam for generating and measuring microstructures
SIEMENS AG31 citations92
US4675524AJun 23, 1987
Scanning particle microscope with diminished boersch effect
SIEMENS AG27 citations91
US4808821AFeb 28, 1989
Spectrometer objective for electron beam mensuration techniques
SIEMENS AG20 citations82
US4587481AMay 6, 1986
Arrangement for testing micro interconnections and a method for operating the same
SIEMENS AG21 citations82
US4677296AJun 30, 1987
Apparatus and method for measuring lengths in a scanning particle microscope
SIEMENS AG18 citations74
US4393308AJul 12, 1983
High current electron source
SIEMENS AG10 citations70
ADVANTEST CORP
6 patentsUS6107633AAug 22, 2000
Electron beam lens
ADVANTEST CORP27 citations92
US6104034AAug 15, 2000
Objective lens
ADVANTEST CORP24 citations92
US5895919AApr 20, 1999
Gun lens for generating a particle beam
ADVANTEST CORP19 citations92
US6667478B2Dec 23, 2003
Particle beam apparatus
ADVANTEST CORP17 citations84
US6232601B1May 15, 2001
Dynamically compensated objective lens-detection device and method
ADVANTEST CORP18 citations82
US6407388B1Jun 18, 2002
Corpuscular beam device
ADVANTEST CORP12 citations74
ACT ADVANCED CIRCUIT TESTING
5 patentsUS5780859AJul 14, 1998
Electrostatic-magnetic lens arrangement
ACT ADVANCED CIRCUIT TESTING30 citations91
US5895917AApr 20, 1999
Detector objective lens
ACT ADVANCED CIRCUIT TESTING17 citations83
US5885354AMar 23, 1999
Method and apparatus for processing a specimen
ACT ADVANCED CIRCUIT TESTING14 citations74
US6051838AApr 18, 2000
Optical unit
ACT ADVANCED CIRCUIT TESTING14 citations73
US5808309ASep 15, 1998
Apparatus for generating an electron beam
ACT ADVANCED CIRCUIT TESTING7 citations73
ALMOGY GILAD
1 patentEBETECH ELECTRON BEAM TECHNOLO
1 patentJEOL LTD
1 patentAPPLIED MATERIALS ISRAEL LTD
1 patentShowing the top 50 of 74 patents by PatentIndex Score.