Inventor
SATYA AKELLA V S
US23 patents
⚠️ This page may combine multiple inventors who share the name “SATYA AKELLA V S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR
8 patentsUS6771806B1Aug 3, 2004
Multi-pixel methods and apparatus for analysis of defect information from test structures on semiconductor devices
KLA TENCOR258 citations99
US6633174B1Oct 14, 2003
Stepper type test structures and methods for inspection of semiconductor integrated circuits
KLA TENCOR195 citations99
US6636064B1Oct 21, 2003
Dual probe test structures for semiconductor integrated circuits
KLA TENCOR127 citations98
US6524873B1Feb 25, 2003
Continuous movement scans of test structures on semiconductor integrated circuits
KLA TENCOR102 citations98
US7655482B2Feb 2, 2010
Chemical mechanical polishing test structures and methods for inspecting the same
KLA TENCOR91 citations97
US7179661B1Feb 20, 2007
Chemical mechanical polishing test structures and methods for inspecting the same
KLA TENCOR68 citations97
US6566885B1May 20, 2003
Multiple directional scans of test structures on semiconductor integrated circuits
KLA TENCOR57 citations96
US6528818B1Mar 4, 2003
Test structures and methods for inspection of semiconductor integrated circuits
KLA TENCOR60 citations96
KLA TENCOR TECH CORP
6 patentsUS6751519B1Jun 15, 2004
Methods and systems for predicting IC chip yield
KLA TENCOR TECH CORP222 citations99
US7656170B2Feb 2, 2010
Multiple directional scans of test structures on semiconductor integrated circuits
KLA TENCOR TECH CORP96 citations96
US6921672B2Jul 26, 2005
Test structures and methods for inspection of semiconductor integrated circuits
KLA TENCOR TECH CORP59 citations96
US6813572B2Nov 2, 2004
Apparatus and methods for managing reliability of semiconductor devices
KLA TENCOR TECH CORP69 citations96
US6948141B1Sep 20, 2005
Apparatus and methods for determining critical area of semiconductor design data
KLA TENCOR TECH CORP112 citations95
US7012439B2Mar 14, 2006
Multiple directional scans of test structures on semiconductor integrated circuits
KLA TENCOR TECH CORP21 citations92
KLA TENCOR CORP
4 patentsUS6433561B1Aug 13, 2002
Methods and apparatus for optimizing semiconductor inspection tools
KLA TENCOR CORP159 citations98
US6576923B2Jun 10, 2003
Inspectable buried test structures and methods for inspecting the same
KLA TENCOR CORP117 citations97
US6509197B1Jan 21, 2003
Inspectable buried test structures and methods for inspecting the same
KLA TENCOR CORP146 citations97
US6445199B1Sep 3, 2002
Methods and apparatus for generating spatially resolved voltage contrast maps of semiconductor test structures
KLA TENCOR CORP106 citations97
IBM
4 patentsUS4450559AMay 22, 1984
Memory system with selective assignment of spare locations
IBM191 citations96
US3983479ASep 28, 1976
Electrical defect monitor structure
IBM90 citations95
US4100486AJul 11, 1978
Monitor for semiconductor diffusion operations
IBM27 citations76
US4196389AApr 1, 1980
Test site for a charged coupled device (CCD) array
IBM6 citations57