Inventor
IM SUK-HEE
KR3 patents
Patents
3 patentsUS6849100B2Feb 1, 2005
Fresh air ducts including downstream filters for clean rooms
SAMSUNG ELECTRONICS CO LTD25 citations90
US7258728B2Aug 21, 2007
Apparatus and method for cleaning air
SAMSUNG ELECTRONICS CO LTD19 citations89
US7357144B2Apr 15, 2008
Contamination control apparatus, management system and related methods
SAMSUNG ELECTRONICS CO LTD14 citations80